2 research outputs found
Highly Sensitive Detection of Inorganic Contamination
As the detection of inorganic contaminants is of steadily increasing importance for the improvement
of yields in microelectronic applications, the aim of one of the joint research activity within the
European Integrated Activity of Excellence and Networking for Nano- and Micro-Electronics
Analysis (ANNA, site: www.ANNA-i3.org) is the development and assessment of new methodologies
and metrologies for the detection of low concentration inorganic contaminants in silicon and in
novel materials. A main objective consist in the benchmarking of various analytical techniques
available in the laboratories of the participating ANNA partners, including the improvement of the
respective detection limits as well as the quantitation reliablity of selected analytical techniques
such as total-reflection x-ray fluorescence (TXRF) analysi