Lateral Force Calibration Method Used for Calibration of Atomic Force Microscope

Modern heterogeneous micro- and nanostructures usually integrate modules fabricated using various materials and technologies. Moreover, it has to be emphasized that the macro and micro nanoscale material parameters are not the same. For this reason it has become crucial to identify the nanomechanical properties of the materials commonly used in micro- and nanostructure technology. One of such tests is a nanowear test performed using the atomic force microscope (AFM). However, to obtain quantitative measurement results a precision calibration step is necessary. In this paper a novel approach to calibration of lateral force acting on the tip of an AFM cantilever is discussed. Presented method is based on application of known lateral force directly on the tip using a special test structure. Such an approach allows for measurements of nanowear parameters (force, displacement) with the uncertainty better than š3%. The calibration structure designed specifically for this calibration method is also presented

Normal Force Calibration Method Used for Calibration οf Atomic Force Microscope

Development of new technologies for micro/nanostructures is connected with introduction of new materials or with application of already existing ones in micro- and nanoscale. Unfortunately material parameters in macro- and micro/nanoscale are not the same. For this reason it has become crucial to identify nanomechanical properties of materials commonly used in micro- and nanostructures technology. One of the tests used for that purpose is nanowear test made on the atomic force microscope. However, to obtain quantitative results of measurements, precision calibration step is necessary. In this paper a novel approach to calibration of normal force, which is acting on the tip of an atomic force microscope cantilever, is discussed. Presented method is based on application of known normal force directly on the tip using special test structure. Such an approach allows for measurements of nanowear parameters (force, displacement) with uncertainty better than ± 3%. Authors present and discuss different constructions of calibration samples. A comparison of described method with already existing ones is also presented

Multi-Domain Modeling and Simulations of the Heterogeneous Systems

This paper discusses the multi-domain modeling and simulation issues of the design and analysis of heterogeneous integrated systems. Modeling and simulation methodlogy and tools are also discussed