Discharge studies with a high-efficiency XeCl excimer laser

Results on a high efficiency excimer laser operating according to the prepulse-mainpulsetechnique are reported. The laser volume of about 90 cm is X-ray preionized. The mainpulse obtained from a PFN 2 swiched onto the discharge by means of a racetrack saturable inductor (magnetic switching) connected to the laser head with low inductance. Laser output energy has been measured as a function of gas mixture and delay between X-ray and prepulse

Magnetic pulse compression in the prepulse circuit for a 1 kW, 1kHz XeCl excimer laser

Using high quality low loss ferrite, a single stage magnetic pulse compression network has been demonstrated working at 1 kHz PRF. A pulse compression factor of 4 has been achieved, delivering a 50 ns pulse as prepulse in the excitation circuit for a high power XeC1-excimer laser

Discharge technology for excimer lasers of high-average power

The self-sustained discharge of excimers is analyzed. Several excitation schemes that have been successfully applied are compared. For high repetition rate operation not only the discharge stability and its efficiency are important selection criteria but more important is the potential of fast discharge switching with minimum pulse energy. Pulse compression plays a key role in the laser performance. A technology for low energy compression is described

Discharge technology of excimerlasers of high average power

The self-sustained discharge of excimers is analyzed. Several excitation schemes that have been successfully applied are compared. For high repetition rate operation not only the discharge stability and its efficiency are important selection criteria but more important is the potential of fast discharge switching with minimum pulse energy. Pulse compression plays a key role in the laser performance. A technology for low energy compression is described

Discharge studies with a high efficiency XeCl-excimer laser

Results on a high efficiency excimer laser operating according to the prepulse-mainpulsetechnique are reported. The laser volume of about 90 cm is X-ray preionized. The mainpulse obtained from a PFN 2 swiched onto the discharge by means of a racetrack saturable inductor (magnetic switching) connected to the laser head with low inductance. Laser output energy has been measured as a function of gas mixture and delay between X-ray and prepulse