Optimierung von MIkrosystemen fuer Diagnose- und Ueberwachungsanwendungen (OMID) Abschlussseminar

Available from TIB Hannover: ZA 5141(6774) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung und Forschung, Berlin (Germany)DEGerman

Adaption eines elektronischen Laborbuchs (Elab) an ein objektorientiertes Datenbank-Management-System

The Electronic Laboratory Book Elab is a tool which supports the development of manufacturing processes in microsystem engineering. Processes and process sequences are presented and can be modified by the user. Development of variants is supported, too. Elab is an object oriented system. Multi user operation, access control and versioning require support of an object oriented database management system. Therefore the database system ObjectStore containing a Smalltalk interface (OSST) has been selected. Parallel access of different applications on persistent data requires special locking mechanisms based on the low level locking mechanisms of ObjectStore database. A high level mechanism has been developed which allows semantic locking on an object based level. During multi user operation users are members of different project groups and only have access to data belonging to their own groups. A Superuser is responsible for managing user data. (orig.)SIGLEAvailable from TIB Hannover: ZA 5141(5921) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekDEGerman

Entwicklung einer rechnergestuetzten Entwurfsmethode fuer optische Mikrosysteme und deren Anwendung auf einen Heterodynempfaenger

Manufacturing test structures of microsystems is a very expensive process, both in terms of time and money. For this reason, computer-supported design technologies ensuring continuous support in all design phases and, consequently, also consistency, are becoming more and more important in microsystems technology. The concept underlying this thesis is the computer-aided design of a modular system rugged enough to be employed in mass fabrication. In mass fabrication, it is not the ideal arrangement of individual components which results in the most effective system. Instead, tolerances in positioning individual optical elements need to be taken into account already in modeling. The absence of a standard material system for micro-optical systems normally renders monolithic designs impossible. Consequently, complex micro-optical systems are modular designs. The modular structure of such hybrid systems requires that single components be manufactured in isolation and later combined into one total system. Combining single components into one overall system is bound to be subject to certain tolerances. Furthermore environmental influences like e.g. variations of the temperature can have an impact on the performance of the micro-optical function module. Besides this, optical phenomena like e.g. the spherical aberration of the microlenses have to be concidered. Consequently, in putting this concept to work, those influences need to be determined in a first step which have a negative impact on the performance of the micro-optical system. These factors detracting from performance may have various causes, and need to be defined separately for each microsystem. (orig.)Dissertation submitted by Sieber, I.Available from TIB Hannover: ZA 5141(6403) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

MIDAS - ein wissensbasiertes System zur Unterstuetzung des fertigungsgerechten Entwurfs von LIGA-Mikrostrukturen

The LIGA-process is a technique which has been developed for the fabrication of microstructures. In the recent years this technology has been used more and more for industrial purposes, from which additional economical requirements arise. The key for an efficient use of fabrication-facilities is a fabrication-related design, because the design of a microstructure may affect the whole following fabrication and mounting process in a positive or a negative manner. Due to this it is important to consider technological influences on a product's shape already during construction. For this an appropriate fabrication knowledge is required. However the extensive knowledge needed for the construction of LIGA-microstructures has reached a high level of complexity in the meantime. Therefore the designer depends on an adequate support through information techniques. For this purpose the knowledge-based system MIDAS (Microstructure Diagnosis and Answerkbook System) which is the subject of this thesis has been developed. The first step to a knowledge-based design support is to provide a tool which allows acquiring and accessing fabrication knowledge interactively. Therefore MIDAS contains an information and acquisition component which is based on object-oriented models of the fabrication-knowledge. The next level of design support is a so-called design rule check. The aim of this procedure is to verify the correctness of a layout. The verification procedure is based on technological constraints concerning a microstructure's shape and dimensions. For this purpose MIDAS provides a diagnosis tool which performs a design rule check based on an appropriate set of design rules. Hereby the values of critical design features are extracted from the layout and compared with a technologically recommendable value range. Every violation of a design rule is recorded by the tool. Finally the results of the design rule check are displayed. The concept described above has been realized in a first prototype. The realisability of the concepts could be proved by examples based on real layouts. (orig.)Dissertation by Buchberger, P.Available from FIZ Karlsruhe / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

Entwicklung von Verfahren fuer den Einsatz der Finite-Elemente-Methode in der Systemoptimierung von Mikrosystemkomponenten

Summary in English. Dissertation submitted by A. QuinteAvailable from TIB Hannover: ZA 5141(5951) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

Entwicklung von Verfahren zur Erstellung adaptierter Makromodelle fuer den Einsatz bei der Designoptimierung von Mikrosystemen

Summary in English. Dissertation submitted by S. MeinzerAvailable from TIB Hannover: ZA 5141(5952) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

Objektorientierte Modellierung am Beispiel eines Mikrosystems zur Messung von Beschleunigungen

During the last years, microsystem technology emerged from the combination of both the fields of micromechanis and microelectronis. Although a precise definition of the term micro system has not yet been agreed upon, there is a trend towards miniaturized systems, which, due to their complexity, cannot be designed economically without computer based tools. Especially the cooperation of specialists of different disciplines must be supported. Support of the design process is achieved by implementing a computer based model of the system under development. Starting in the early stages of the design process, the static and dynamic properties of the entire system are described by means of simplified models of the system components. Several methods are examined and their applicability is discussed. One way of modelling the system is to use a object oriented knowledge representation. The advantages of this approach are shown. Especially the modelling of static and dynamic properties within one method, the support of decomposing the system in its components and the availability of commercial tools are worth mentioning. To carry out the modelling, a tool is developed which is based on an expert system shell. A microsystem for acceleration measurement, which has been developed at the Forschungszentrum Karlsruhe, is being modelled to show the feasibility of this approach. The essential properties of the real system can be found in the model. The data processing as a vital component is brought into the model by including the software of the system, which also has been developed as part of this thesis. Possible modifications of components and the system design are described and their influence on the model is discussed to demonstrate how the model can serve as a base for further development of the system. In a short outlook it is shown that the approach described in this thesis can be combined with a design scheme for micro systems which has developed earlier. Finally a few possible improvements of the modelling tool and its relation to other works is shown. (orig.)Dissertation submitted by K. LindemannAvailable from TIB Hannover: ZA 5141(5630) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

Entwurf eines Systems zur Erfassung und Weiterverarbeitung von Produktinformation bei der Herstellung von Mikrostrukturen

The LIGA-process (german acronym for Lithographie, Galvanik, Abformung) has been developed at the Institute for Microstructural Engineering (IMT) at the Karlsruhe Research Center for manufacture microstructures. Today, the IMT is employing the LIGA-technique to manufacture the mechanical parts of microsystems, meanwhile the technique is constantly being extended and improved. In order to obtain improved surveillance over the complex LIGA-process with its numerous process steps, it is necessary to develop a computer based framework to summarize the overall LIGA-process. This system allows the collection of all process steps with all parameters, all material information and all resources of the process. Experience made during the production of microstructures represents manufacturing knowledge. Thus it is necessary to design the framework in such a way as to allow the collection of information about manufactured products. This thesis contains the design of such a system called PRAXIS (PRoduct And EXperimentation Information System). PRAXIS offers the project managers the possibility to embed arbitrary tools into the framework that grasp and process such information and support or perform the process steps or activities. These tools use data integrated by an object-oriented database management system. (orig.)Dissertation submitted by P. WielandAvailable from TIB Hannover: ZA 5141(5597) / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEDEGerman

DEMIS - DEsignoptimierung fuer MIkroSysteme Gemeinsamer Abschlussbericht

Available from TIB Hannover: F00B1503+a / FIZ - Fachinformationszzentrum Karlsruhe / TIB - Technische InformationsbibliothekSIGLEBundesministerium fuer Bildung, Wissenschaft, Forschung und Technologie, Bonn (Germany)DEGerman