1 research outputs found
Reliability and early failure in Cu/oxide dual-damascene interconnects
- Author
- A.H. Fischer
- C.-K. Hu
- C.-K. Hu
- C.-K. Hu
- C.K. Hu
- C.K. Hu
- C.K. Hu
- C.K. Hu
- C.K. Hu
- C.K. Hu
- C.Y. Li
- E.M. Atakov
- E.T. Ogawa
- E.T. Ogawa
- E.T. Ogawa
- Ennis T. Ogawa
- F.M. d’Heurle
- H. Helneder
- H. Sato
- H.U. Schrieber
- Hideki Matsuhashi
- I.A. Blech
- I.A. Blech
- I.A. Blech
- J. Cho
- J. Proost
- J. Proost
- J. Proost
- J.R. Black
- J.R. Lloyd
- J.S. Huang
- K.-D. Lee
- K.L. Lee
- Ki-Don Lee
- L.P. Murray
- M. Gall
- M. Gall
- M. Gall
- M.A. Korhonen
- M.A. Korhonen
- M.A. Korhonen
- M.A. Korhonen
- M.H. Tsai
- M.J. Attardo
- M.J. Attardo
- M.P. Surh
- P. Børgesen
- P.-C. Wang
- P.-C. Wang
- P.-C. Wang
- Paul S. Ho
- R. Frankovic
- R. Frankovic
- R. Rosenberg
- R.A. Augur
- R.G. Filippi
- Robert H. Havemann
- S.R. Thrasher
- T. Usui
- T.D. Sullivan
- V.K. Andleigh
- Volker A. Blaschke
- Y. Liu
- Y. Morand
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study