196 research outputs found

    Cryogenic permanent magnet and superconducting undulators

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    Beamline and exposure station for deep x-ray lithography at the advanced photon source

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    APS is a third-generation synchrotron radiation source. With an x-ray energy of 19.5 keV and highly collimated beam ( 1 mm) using deep x-ray lithography (DXRL). The 2-BM beamline was constructed and will be used for DXRL at APS. Selection of appropriate x-ray energy range is done through a variable-angle mirror and various filters in the beamline. At the exposure station, the beam size will be 100(H) x 5(V) mm{sup 2}. Uniform exposure will be achieved by a high-speed (100 mm/sec) vertical scanner, which allows precise angular ({approximately}0.1 mrad) and positional (< 1 {mu}m) control of the sample, allowing full use of the highly collimated beam for lateral accuracy and control of sidewall slopes during exposure of thick resists, as well as generation of conicals and other profiles. For 1-mm-thick PMMA, a 100 x 25 mm{sup 2} area can be fully exposed in about 1/2 hr, while even 10-mm-thick PMMA will require only 2-3 hours

    The LIL for UU-statistics in Hilbert spaces

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    We give necessary and sufficient conditions for the (bounded) law of the iterated logarithm for UU-statistics in Hilbert spaces. As a tool we also develop moment and tail estimates for canonical Hilbert-space valued UU-statistics of arbitrary order, which are of independent interest

    Moments of unconditional logarithmically concave vectors

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    We derive two-sided bounds for moments of linear combinations of coordinates od unconditional log-concave vectors. We also investigate how well moments of such combinations may be approximated by moments of Gaussian random variables.Comment: 14 page
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