МЕТОДЫ АВТОМАТИЧЕСКОГО КОНТРОЛЯ ТОПОЛОГИИ ПЛАНАРНЫХ СТРУКТУР ИЗДЕЛИЙ ЭЛЕКТРОННОЙ ТЕХНИКИ

The given paper contains description of existing methods for automatic control of planar structure layout pertaining to products of micro- and nanoelectronics and other electronic technologies products and their classification. An algorithm of method selection is based on the analysis of  factors influencing on method preference and depends on characteristics of an object to be controlled and controlling conditions. The described algorythm is to be applied in the process of designing the equipment for automatic control of planar structure layout on  photographic masks, semiconductor wafers, printed-circuit boards with high-density assembly. Приводится описание существующих методов автоматического контроля топологии планарных структур изделий микро- и наноэлектроники, других изделий электронной техники, дается их классификация. На основании анализа факторов, влияющих на принятие решения о выборе метода контроля топологии, определяется алгоритм выбора метода в зависимости от характеристик контролируемого объекта и условий контроля. Описанный алгоритм предназначен для использования при проектировании оборудования для автоматического контроля топологии планарных структур на фотошаблонах, полупроводниковых пластинах, печатных платах высокой плотности монтажа.

МАТЕМАТИЧЕСКАЯ МОДЕЛЬ ФОРМИРОВАНИЯ СЕТКИ ДИСКРЕТНОСТИ ВЫСОКОГО РАЗРЕШЕНИЯ ДЛЯ СИСТЕМЫ ПЕРЕМЕЩЕНИЙ НА ЛИНЕЙНОМ ШАГОВОМ ПРИВОДЕ

The mathematical model of the forming of high resolution discrete grid for various configurations of toothing surface of poles of stator and inductor of linear stepping motor. The method of the forming of discrete grid was developed on the base of mathematical model; it takes into account various factors which affect to the accuracy of position of discrete grid nodes. The verification results of mathematical model developed were shown, they confirm the increasing of accuracy of motion systems on the base of linear stepping motors.Представлена математическая модель формирования координатной сетки дискретности высокого разрешения для различных вариантов конфигурации зубцовых поверхностей полюсов индуктора и статора линейного шагового двигателя. На основании математической модели разработана методика формирования координатной сетки дискретности, которая учитывает различные факторы, влияющие на погрешность положения узлов сетки дискретности. Показаны результаты верификации разработанной математической модели, подтверждающие повышение точности систем перемещений на базе линейных шаговых двигателей

Transverse-Longitudinal Asymmetry in the Quasielastic 3He→(e→, e′) Reaction

The transverse-longitudinal asymmetry ATL′ in 3He→(e→, e′) quasielastic scattering at momentum transfer Q2=0.14 (GeV/c)^2 has been measured to be 1.52 ± 0.55(stat) ± 0.15(syst)%. The plane wave impulse approximation (PWIA) prediction for this measurement ranges from 2.1% to 2.9%, where the variation is due to uncertainty in the initial state wave function, nucleon form factors, and off-shell prescription. The data may suggest a suppression with respect to the PWIA, which has also been observed for the unpolarized longitudinal response function

METHODS FOR AUTOMATIC CONTROL OF PLANAR STRUCTURE LAYOUT PERTAINING TO ELECTRONICS TECHNOLOGIES PRODUCTS

The given paper contains description of existing methods for automatic control of planar structure layout pertaining to products of micro- and nanoelectronics and other electronic technologies products and their classification. An algorithm of method selection is based on the analysis of  factors influencing on method preference and depends on characteristics of an object to be controlled and controlling conditions. The described algorythm is to be applied in the process of designing the equipment for automatic control of planar structure layout on  photographic masks, semiconductor wafers, printed-circuit boards with high-density assembly

MATHEMATICAL MODEL OF THE FORMING OF HIGH RESOLUTION DISCRETE GRID FOR MOTION SYSTEM BASED ON LINEAR STEPPING DRIVE

The mathematical model of the forming of high resolution discrete grid for various configurations of toothing surface of poles of stator and inductor of linear stepping motor. The method of the forming of discrete grid was developed on the base of mathematical model; it takes into account various factors which affect to the accuracy of position of discrete grid nodes. The verification results of mathematical model developed were shown, they confirm the increasing of accuracy of motion systems on the base of linear stepping motors

The Impact of ESD on Microcontrollers

M odern m ethods and means of testing the stability of microcontrollers to the effects of electrostatic discharges are considered. The analysis of functional and operational characteristics of microcontrollers with a program code written in the built-in flash memory is performed. A damage mechanisms classifi­ cation to m icrocontrollers after the influence of electrostatic discharge and the possibility of developing new algorithms for technical diagnostics of microcontrollers are proposed. O n the basis of thermal processes analysis occurring in current-carrying elements of integrated cir­ cuits, the dependence of temperature, electric field strength and power of electromagnetic losses in each element and in their contact areas is shown, depending on the electrostatic discharge voltage. It is shown that electrostatic discharge affects change in programmed data in microcontrollers. The m ethod of functional control of microcontrollers, after exposure to static electricity discharges, developed by the authors is described; this m ethod makes it possible to improve the result of culling of potentially unreliable products by obtaining information about possible violations in the built-in flash memory of microcircuits. The monograph is intended for scientists, engineers, graduate students and undergraduates working in the field of integrated circuits reliability assessment. It can be used by senior courses students of rele­ vant specialties