Simulation studies of parametric amplification in bio-inspired flow sensors

In this paper the effect of parametric amplification in MEMS-based air-flow hairsensors is studied. With an AC-voltage controlled torsional stiffness the rotation of the hair can be influenced. With the appropriate amplitude, phase and frequency, the rotation of the torsional hair system is increased with respect to the case without parametric amplification. Therefore, parametric amplification is identified as a method to improve the performance of MEMS-based hair air flow sensors

Parametric amplification and stochastic resonance in bio-inspired hair flow sensors

Inspired by crickets and its perception for flow phenomena, artificial hair flow sensors have been developed successfully in our group. The realization of array structures and improvement of fabrication methodologies have led to better performance, making it possible to detect and measure flow velocities in the range of sub-mm/s. To improve the performance of these artificial hair flow sensors even further, we will make use of non-linear effects. In nature a wide range of such effects exist (filtering, parametric amplification, etc.) and can give a rise\ud in sensitivity, dynamic range and selectivity. Here, we propose to use parametric amplification and stochastic resonance to improve our flow sensor performance

Highly sensitive micro coriolis mass flow sensor

We have realized a micromachined micro Coriolis mass flow sensor consisting of a silicon nitride resonant tube of 40 ?m diameter and 1.2 μm wall thickness. Actuation of the sensor in resonance mode is achieved by Lorentz forces. First measurements with both gas and liquid flow have demonstrated a resolution in the order of 10 milligram per hour. The sensor can simultaneously be used as a density sensor

On the Use of Various Oscillatory Air Flow Fields for Characterization of Biomimetic Hair Flow Sensors

To determine the characteristics of flow sensors, a suitable source for flow generation is required. We discuss three different sources for oscillating air flow, by considering their acoustic impedance, frequency range, velocity and ability to distinguish between flow and pressure. We discuss the impact of these sources on characterization of our biomimetic hair flow sensors, which operate at flow velocities from 1–100 mm/s within a frequency range from 10–1000 Hz

Uncovering signals from measurement noise by electro mechanical amplitude modulation

We present an electromechanical parametric scheme to improve the low-frequency signal-to-noise ratio of energy buffering type transducers. The method is based on periodic modulation of the stiffness in the sensory system which produces upconverted replicas of the signals of interest at frequencies where measurement is less troubled by noise or other detrimental effects. We demonstrate this principle by means of capacitive biomimetic hair flow sensors, where we modulate the rotational spring stiffness by periodic electrostatic spring softening, such that a replica of the original signal is formed around the modulation frequency. Using this replica we gain up to a 25-fold improvement of the low-frequency signal-to-noise ratio and sensing threshold. For transient measurements we demonstrate that tiny signals, which are below the noise-levels in the base-band, are revealed well when upconverted to higher frequencies

Micro Coriolis mass flow censor with extended range for a monopropellant micro propulsion system

We have designed and realised a micromachined micro Coriolis flow sensor for the measurement of hydrazine (N2H4, High Purity Grade) propellant flow in micro chemical propulsion systems. The sensor should be able to measure mass flow up to 6 mg/s for a single thruster or up to 24 mg/s for four thrusters. The sensor will first be used for measurement and characterisation of the micro thruster system in a simulated space vacuum environment. Integration of the sensor chip within the micro thruster flight hardware will be considered at a later stage. The new chip has an increased flow range because of an integrated on-chip bypass channel. First measurement results have demonstrated an increase in flow range which corresponds well to the designed bypass ratio

Gravity gradiometer system for Earth Exploration

We develop a gravity gradiometer (GG) for use on planetary missions to planets like Mars and Jupiter. With some modifications this development is extended to include (airborne) applications for the Dutch exploratory industry. We adapt key technology of the space based GG for the use in an environment with considerable acceleration noise. The major benefit is the considerable decrease in weight and size with the presently used gradiometer systems

Bio-inspired hair-based inertial sensors

In biology, hair-based sensor systems are used regularly for measurement of physical quantities like acceleration, flow, rotational rate, and IR light. In this chapter, two different types of bio-inspired sensors for inertial measurement are discussed, which have been developed using surface micromachining and SU-8 lithography. First, an accelerometer inspired by the cricket’s clavate hair is presented. Second, a gyroscope inspired by the fly’s haltere is treated. For both, sensors are the necessary models presented, and guidelines are derived for optimization. Also, their performance is compared to their biological counterpart and the biomimetic potential is discussed

Towards a biomimetic gyroscope inspired by the fly's haltere using microelectromechanical systems technology

Flies use so-called halteres to sense body rotation based on Coriolis forces for supporting equilibrium reflexes. Inspired by these halteres, a biomimetic gimbal-suspended gyroscope has been developed using microelectromechanical systems (MEMS) technology. Design rules for this type of gyroscope are derived, in which the haltere-inspired MEMS gyroscope is geared towards a large measurement bandwidth and a fast response, rather than towards a high responsivity. Measurements for the biomimetic gyroscope indicate a (drive mode) resonance frequency of about 550 Hz and a damping ratio of 0.9. Further, the theoretical performance of the fly's gyroscopic system and the developed MEMS haltere-based gyroscope is assessed and the potential of this MEMS gyroscope is discussed