21 research outputs found
Recommended from our members
High-power laser source evaluation
This document reports progress in these areas: EXPERIMENTAL RESULTS FROM NOVA: TAMPED XENON UNDERDENSE X-RAY EMITTERS; MODELING MULTI-KEV RADIATION PRODUCTION OF XENON-FILLED BERYLLIUM CANS; MAPPING A CALCULATION FROM LASNEX TO CALE; HOT X RAYS FROM SEEDED NIF CAPSULES; HOHLRAUM DEBRIS MEASUREMENTS AT NOVA; FOAM AND STRUCTURAL RESPONSE CALCULATIONS FOR NIF NEUTRON EXPOSURE SAMPLE CASE ASSEMBLY DESIGN; NON-IGNITION X-RAY SOURCE FLUENCE-AREA PRODUCTS FOR NUCLEAR EFFECTS TESTING ON NIF. Also appended are reprints of two papers. The first is on the subject of ``X-Ray Production in Laser-Heated Xe Gas Targets.`` The second is on ``Efficient Production and Applications of 2- to 10-keV X Rays by Laser-Heated Underdense Radiators.`
Recommended from our members
Experiments and modeling with a large-area inductively coupled plasma (ICP) source
We describe initial experiments with a large (30 in.) plasma source chamber to explore the problems associated with large-area Inductively coupled plasma (ICP) sources to produce high density plasmas useful for processing 400 mm semiconductor wafers. Our experiments typically use a 25 in. diameter planar ICP coil driven at 13.56 MHz. Plasma and system data are taken in Ar and N{sub 2} over the pressure range 3--50 mtorr. R.F. Inductive power was run up to 2000W, but typically data were taken over the range 100--1000W. Diagnostics Include optical emission spectroscopy, Langmuir probes, and B-dot probes as well as electrical circuit measurements. The B-dot and E-M measurements are compared with models based on commercial E-M codes. Initial indications are that uniform plasmas suitable for 400 mm processing are attainable. We present a comparison between computer modeling and experimental results for this source. Computer simulations using the fluid code INDUCT94 are used to explain variations In the plasma density profile measurements as a function of Inductive power, gas pressure and gas composition. Both Argon and Nitrogen discharges are modeled. INDUCT94 solves the 2D time-dependent fluid equations for electrons, ions and neutrals Including effects of both Inductive and capacitive coupling. Detailed volume and surface chemistry reactions are treated. We discuss the effects of pressure and power on plasma uniformity