5 research outputs found
Autofocus in the systems of automatic mask and wafer pattern inspection
No full textΠΠ»Ρ ΠΏΠΎΠ²ΡΡΠ΅Π½ΠΈΡ ΡΠΎΡΠ½ΠΎΡΡΠΈ Π°Π²ΡΠΎΠΌΠ°ΡΠΈΠ·ΠΈΡΠΎΠ²Π°Π½Π½ΠΎΠ³ΠΎ ΠΊΠΎΠ½ΡΡΠΎΠ»Ρ Π΄Π΅ΡΠ΅ΠΊΡΠΎΠ² ΡΠΎΠΏΠΎΠ»ΠΎΠ³ΠΈΡΠ΅ΡΠΊΠΎΠ³ΠΎ ΡΠΈΡΡΠ½ΠΊΠ° ΡΠΎΡΠΎΡΠ°Π±Π»ΠΎΠ½ΠΎΠ² ΠΈ ΠΏΠΎΠ»ΡΠΏΡΠΎΠ²ΠΎΠ΄Π½ΠΈΠΊΠΎΠ²ΡΡ
ΠΏΠ»Π°ΡΡΠΈΠ½ ΠΏΡΠ΅Π΄Π»ΠΎΠΆΠ΅Π½Π° ΡΠΈΡΡΠ΅ΠΌΠ° Π°Π²ΡΠΎΡΠΎΠΊΡΡΠΈΡΠΎΠ²ΠΊΠΈ, ΠΎΠ±Π΅ΡΠΏΠ΅ΡΠΈΠ²Π°ΡΡΠ°Ρ ΡΠ΄Π΅ΡΠΆΠ°Π½ΠΈΠ΅ ΠΏΠΎΠ²Π΅ΡΡ
Π½ΠΎΡΡΠΈ ΠΎΠ±ΡΠ΅ΠΊΡΠ° Π² Π·ΠΎΠ½Π΅ ΡΠ΅Π·ΠΊΠΎΡΡΠΈ ΠΎΠ±ΡΠ΅ΠΊΡΠΈΠ²Π° ΠΏΡΠΈ ΠΏΠΎΡΠ»Π΅Π΄ΠΎΠ²Π°ΡΠ΅Π»ΡΠ½ΠΎΠΌ ΡΠΊΠ°Π½ΠΈΡΠΎΠ²Π°Π½ΠΈΠΈ ΡΠΎΠΏΠΎΠ»ΠΎΠ³ΠΈΠΈ.In order to increase accuracy of automatic mask and wafer pattern inspection an autofocus system is offered which ensures keeping the plane in objective focus zone during the sequential scanning of the pattern
Self-consistent dynamics of an ensemble of screw dislocations during plastic deformation of crystals
No full textSpace missions for astronomy and astrophysics in Korea: past, present, and future
No full textWe review the history of space missions in Korea focusing on the field of astronomy and astrophysics. For each mission, scientific motivation and achievement are reviewed together with some technical details of the program, including mission schedule. This review includes ongoing and currently approved missions, as well as some planned ones. Within the admitted limitations of the authors' perspectives, some comments on the future direction of the space program for astronomy and astrophysics in Korea are made at the end of this review
