8 research outputs found
Chemical etching of Gallium orthophosphate: Application to piezoelectric device manufacturing
This paper presents a study of the chemical etching of
gallium orthophosphate in the way to design high frequency resonators. Four
different orientations (X, Y, Z and AT-cuts) are used. The dissolution rate
is of Arrhenius law type and depends of both the cut orientation and the
concentration of the solvent. The study of the surface state evolution shows
that there is no correlation between the surface state and the dissolution
rate. Antimesa AT-plates with frequency up to 34MHz and QF factor of
are manufactured with this method
Effect of Ga Content on the Instantaneous Structure of Al(1-x)GaxPO4 Solid Solutions at High Temperature
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