A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure rf glow discharges

A numerical model of a low pressure parallel plate rf glow discharge is presented based on a self-consistent formulation of the energy-momentum conservation equations for electrons, the continuity equations for both electrons and ions, and Poisson's equation. Various explicit finite-difference numerical methods are discussed in terms of stability and overshoot properties. Stability considerations for the numerical method that was implemented, including the initial and the boundary conditions, are examined. Results from a large-signal simulation of a low pressure argon rf glow discharge are presented.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/27230/1/0000237.pd

Chamber material effects on actinometric measurements in rf glow discharges

The relative concentration of atomic fluroine was measured in a CF4 rf glow discharge using the actinometric technique. The dependence of fluorine concentration on power, pressure and flow are presented and shown to be dependent upon reactor wall material and electrode material.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/70093/2/JAPIAU-69-5-2885-1.pd

Erratum: ‘‘Large‐signal time‐domain modeling of low‐pressure rf glow discharges’’ [J. Appl. Phys. 61, 81 (1987)]

Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/69545/2/JAPIAU-61-9-4711-1.pd

Large‐signal time‐domain modeling of low‐pressure rf glow discharges

Large‐signal time‐domain modeling (simulation) of rf glow discharges is a very useful and potentially accurate tool for the study of low‐pressure (50–500‐mT) gaseous electronics at high frequencies. Unfortunately, the computational limitations imposed for stability, accuracy, and efficiency can often hinder the production of useful, cost‐effective results. This paper describes a self‐consistent argon rf glow‐discharge simulation at 13.56 MHz for equal‐ and unequal‐area parallel‐plate electrode geometries. Some of the numerical problems associated with this type of simulation are identified and the numerical methods used to overcome them are described. To illustrate the usefulness of this modeling scheme, the plasma potential and the cathode dc bias are examined as functions of electrode area ratio and rf power.Peer Reviewedhttp://deepblue.lib.umich.edu/bitstream/2027.42/70493/2/JAPIAU-61-1-81-1.pd