10 research outputs found
Dispersion force for materials relevant for micro and nanodevices fabrication
The dispersion (van der Waals and Casimir) force between two semi-spaces are
calculated using the Lifshitz theory for different materials relevant for micro
and nanodevices fabrication, namely, gold, silicon, gallium arsenide, diamond
and two types of diamond-like carbon (DLC), silicon carbide, silicon nitride
and silicon dioxide. The calculations were performed using recent experimental
optical data available in the literature, usually ranging from the far infrared
up to the extreme ultraviolet bands of the electromagnetic spectrum. The
results are presented in the form of a correction factor to the Casimir force
predicted between perfect conductors, for the separation between the
semi-spaces varying from 1 nanometre up to 1 micrometre. The relative
importance of the contributions to the dispersion force of the optical
properties in different spectral ranges is analyzed. The role of the
temperature for semiconductors and insulators is also addressed. The results
are meant to be useful for the estimation of the impact of the Casimir and van
der Waals forces on the operational parameters of micro and nanodevices
Contributions of gasphase reactions to the growth rate of LPCVD Silicon Films in the temperature range 500 to 550 ?C
LPCVD conditions generating an intense homogeneous decomposition of silane in the temperature range of 500-630 degrees C
OrganicâInorganic Ternary Nanohybrids of Single-Walled Carbon Nanohorns for Room Temperature Chemiresistive Ethanol Detection
Organic–inorganic ternary nanohybrids consisting of oxidized-single walled carbon nanohorns-SnO2-polyvinylpyrrolidone (ox-SWCNH/SnO2/PVP) with stoichiometry 1/1/1 and 2/1/1 and ox-SWCNH/ZnO/PVP = 5/2/1 and 5/3/2 (all mass ratios) were synthesized and characterized as sensing films of chemiresistive test structures for ethanol vapor detection in dry air, in the range from 0 up to 50 mg/L. All the sensing films had an ox-SWCNH concentration in the range of 33.3–62.5 wt%. A comparison between the transfer functions and the response and recovery times of these sensing devices has shown that the structures with ox-SWCNH/SnO2/PVP = 1/1/1 have the highest relative sensitivities of 0.0022 (mg/L)−1, while the devices with ox-SWCNH/SnO2/PVP = 2/1/1 have the lowest response time (15 s) and recovery time (50 s) for a room temperature operation, proving the key role of carbonic material in shaping the static and dynamic performance of the sensor. These response and recovery times are lower than those of “heated” commercial sensors. The sensing mechanism is explained in terms of the overall response of a p-type semiconductor, where ox-SWCNH percolated between electrodes of the sensor, shunting the heterojunctions made between n-type SnO2 or ZnO and p-type ox-SWCNH. The hard–soft acid–base (HSAB) principle supports this mechanism. The low power consumption of these devices, below 2 mW, and the sensing performances at room temperature may open new avenues towards ethanol sensors for passive samplers of environment monitoring, alcohol test portable instruments and wireless network sensors for Internet of Things applications
Electrical Percolation Threshold and Size Effects in Polyvinylpyrrolidone-Oxidized Single-Wall Carbon Nanohorn Nanocomposite: The Impact for Relative Humidity Resistive Sensors Design
This paper reports, for the first time, on the electrical percolation threshold in oxidized carbon nanohorns (CNHox)âpolyvinylpyrrolidone (PVP) films. We demonstrateâstarting from the design and synthesis of the layersâhow these films can be used as sensing layers for resistive relative humidity sensors. The morphology and the composition of the sensing layers are investigated through Scanning Electron Microscopy (SEM), Atomic Force Microscopy (AFM), and RAMAN spectroscopy. For establishing the electrical percolation thresholds of CNHox in PVP, these nanocomposite thin films were deposited on interdigitated transducer (IDT) dual-comb structures. The IDTs were processed both on a rigid Si/SiO2 substrate with a spacing of 10 ”m between metal digits, and a flexible substrate (polyimide) with a spacing of 100 ”m. The percolation thresholds of CNHox in the PVP matrix were equal to (0.05â0.1) wt% and 3.5 wt% when performed on 10 ”m-IDT and 100 ”m-IDT, respectively. The latter value agreed well with the percolation threshold value of about 4 wt% predicted by the aspect ratio of CNHox. In contrast, the former value was more than an order of magnitude lower than expected. We explained the percolation threshold value of (0.05â0.1) wt% by the increased probability of forming continuous conductive paths at much lower CNHox concentrations when the gap between electrodes is below a specific limit. The change in the nanocompositeâs longitudinal Young modulus, as a function of the concentration of oxidized carbon nanohorns in the polymer matrix, is also evaluated. Based on these results, we identified a new parameter (i.e., the inter-electrode spacing) affecting the electrical percolation threshold in micro-nano electronic devices. The electrical percolation thresholdâs critical role in the resistive relative-humidity sensorsâ design and functioning is clearly emphasized
Phase and surface roughness evolution for as-deposited LPCVD silicon films
In this paper we present a structural and morphological characterisation of the as-deposited low pressure chemically vapor deposited (LPCVD) silicon films prepared from silane. The results are related to the deposition kinetics in the temperature range from 500 to 615°C and the deposition pressure range from 20 to 100 Pa. From XRD measurements we show for the first time the presence of the polycrystalline state (of preferred orientation) in as-deposited films prepared at temperatures as low as 500°C. This result was connected with an increase of the surface roughness of those films with respect to the roughness obtained on the surface of film prepared at 550°C. At 550°C, a minimum surface roughness of 0.5 nm is obtained and this was connected to the amorphous state of the layer revealed for all deposition pressures studied. At temperatures lower than 550°C, the texture presents a decrease of the grain size as a function of pressure increase. At temperatures higher than 550°C, due to a competition in grain growth process, the and crystallites are also evinced in the film structure, while the surface roughness is rapidly increasing to value of 18-20 nm. These last results are explained in terms of three-dimensional nucleation processes at higher deposition temperatures. The atomic force microscopy (AFM) results support this idea by showing the increase of the number of surface asperities as a function of pressure and the strong decrease of that density as a function of deposition temperature
Sonochemically synthetized ZnO-Graphene nanohybrids and its characterization
The paper presents the morphological, structural and compositional properties of the sonochemically prepared ZnO-1.4wt% Graphene (Z-G) nanocomposites as a function of pH value of suspension varying from 8.5 to 14 and thermal annealing at 450°C in nitrogen or air ambient. The SEM analysis of the Z-G hybrids dried at 150°C in air has shown a nano-flower like nanostructure for a pH value of 14. The XRD analysis of dried Z-G hybrids revealed a crystallite size increase from 3.5 nm to 18.4 nm with pH increase, and this result was explained in terms of colloids zeta potential evolution with pH value. The Raman and EDS spectroscopy have shown a split of the G band (1575 cmâ1) of graphene into two bands (1575 cmâ1 and 1605 cmâ1), an increased height of D (1323 cmâ1) band, and an additional amount of carbon due to CO2 absorption from the air, respectively. The carbon incorporation increased with the decrease of pH, and was associated with a hydrozincite phase, Zn5(CO3)2(OH)6. The formation of dried Z-G nanocomposite was clearly demonstrated only at a pH value equal to 14, where two ZnO Raman active bands at 314.9 cmâ1 and 428.2 cmâ1 appeared. This result may indicate the sensitivity of the Raman spectroscopy to the nanoflower-like nanostructure of dried Z-G hybrids prepared at pH=14. The thermal treatment of Z-G hybrids in N2at 450°C has increased the number of ZnO Raman bands as a function of pH value, it has decreased the amount of additional carbon by conversion of hydrozincite to ZnO and preserved the graphene profile. The thermal treatment in air at 450°C has increased the crystalline symmetry and stoichiometry of the ZnO as revealed by high and narrow Raman band from 99 cmâ1 specific to Zn optical phonons, but it has severely affected the graphene profile in the Z-G hybrid, due to combustion of graphene in oxygen from the ambient
Quaternary Holey Carbon Nanohorns/SnO2/ZnO/PVP Nano-Hybrid as Sensing Element for Resistive-Type Humidity Sensor
In this study, a resistive humidity sensor for moisture detection at room temperature is presented. The thin film proposed as a critical sensing element is based on a quaternary hybrid nanocomposite CNHox//SnO2/ZnO/PVP (oxidated carbon nanohornsâtin oxideâzinc oxideâpolyvinylpyrrolidone) at the w/w/w/w ratios of 1.5/1/1/1 and 3/1/1/1. The sensing structure consists of a Si/SiO2 dielectric substrate and interdigitated transducers (IDT) electrodes, while the sensing film layer is deposited through the drop-casting method. Morphology and composition of the sensing layers were investigated through scanning electron microscopy with energy-dispersive X-ray spectroscopy (SEM-EDX), X-ray diffraction, and Raman spectroscopy. Each quaternary hybrid nanocomposite-based thin filmâs relative humidity (RH) sensing capability was analyzed by applying a direct current with known intensity between two electrodes and measuring the voltage difference when varying the RH from 0% to 100% in a humid nitrogen atmosphere. While the sensor with CNHox/SnO2/ZnO/PVP at 1.5/1/1/1 as the sensing layer has the better performance in terms of sensitivity, the structure employing CNHox//SnO2/ ZnO/PVP at 3/1/1/1 (mass ratio) as the sensing layer has a better performance in terms of linearity. The contribution of each component of the quaternary hybrid nanocomposites to the sensing performance is discussed in relation to their physical and chemical properties. Several alternative sensing mechanisms were taken into consideration and discussed. Based on the measured sensing results, we presume that the impact of the p-type semiconductor behavior of CNHox, in conjunction with the swelling of the hydrophilic polymer, is dominant and leads to the overall increasing resistance of the sensing film