Vers des systèmes d'entraînement planaires dans le domaine de la lithographie

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Hybrid coils having an improved heat transfer capability

A hybrid coil ( 11 ) employs a wire layer ( 22 ), a wire layer ( 23 ) adjacent the wire layer ( 22 ), and a wire layer ( 24 ) adjacent the wire layer ( 23 ). The hybrid coil ( 11 ) further employs a thermal conductive insulator ( 42 ) physically disposed within a space between the wire layer ( 22 ) and the wire layer ( 23 ), and a thermal conductive insulator ( 43 ) physically disposed within a space between the wire layer ( 23 ) and the wire layer ( 24 ). The thermal conductive insulators ( 42, 43 ) can be electrically disconnected, and each thermal conductive insulator ( 42, 43 ) can consists of an aluminum foil ( 42 a, 43 a) having oxide layers ( 42 b, 43 b, 42 c, 43 c) on each side thereof

Electro-dynamic planar motor

The control behaviour of an electro-dynamic motor, also known as a moving coil motor, is superior to other motor types. This is also true for the linear version of this motor type. The classic solution to produce an X-Y movement with a long stroke is to apply a stack of at least two linear motors. A rising moving mass, combined with a limited mechanical stiffness, limits the bandwidth. An alternative is the planar motor, which generates x- and y-movements. This paper describes an electro-dynamic planar motor with moving coils, which elevates and propels itself over long x- and y-strokes under full control over six degrees of freedom (6-DOF)

Contactless lifting of an object by an inverted planar motor

An inverted planar motor employs an integration of a magnetic planar support (20) and a magnetic lift support (30), and a coil actuator (10) magnetically interactive with the magnetic planar support (20) and the magnetic lift support (30). In operation, coil actuator (10) concurrently moves the magnetic planar support (20) and the magnetic lift support (30) parallel to an XY plane of an XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic planar support (20), and exclusively moves the magnetic lift support (30) orthogonal to the XY plane of the XYZ reference frame associated with the coil actuator (10) based on a magnetic interaction between the coil actuator (10) and the magnetic lift support (30)

Method for driving an actuator, actuator drive, and apparatus comprising an actuator

An actuator driver circuit includes a drive signal source and an electrical damping element having a negative resistance connected in series with the drive signal source. A controllable switch is provided for selectively switching the electrical damping element into or put of a signal path from a drive signal source output to a driver circuit output, in order to selectively change the electrical damping of an actuator. For example, the electrical damping of a radial actuator or a focus actuator of an optical disc drive is increased in case of loss of track or loss of focus

Lithographic apparatus and device manufacturing method

A coil for use in an actuator in a lithographic projection apparatus. The coil is formed of a strip of electrically conducting sheet-material that is wound round a winding axis. Respective turns of the strip of sheet-material are separated by an electrically non-conducting laye

Linear motor coil assembly and linear motor

An ironless linear motor (5) comprising a magnet track (53) and a coil assembly (50) operating in cooperation with said magnet track (53) and having a plurality of concentrated multi-turn coils (31 a-f, 41 a-d, 51 a-k), wherein the end windings (31E) of the coils (31 a-f, 41 a-e) are substantially rounded, the coil part (31 S) between the end windings (31E) is straight and the coils (31 a-f, 41a-d, 51a-k) are arranged in an overlapping manner, wherein the end windings (31E) are pressed together, is provided. The coil assembly has the advantage to be flat, thus being easy to handle, and leading to a high steepness

Displacement device

Especially for use in the semiconductor industry, a displacement device ( 701 ) is disclosed comprising a first part comprising a carrier ( 714 ) on which a system of magnets ( 710 ) is arranged according to a pattern of row and columns extending parallel to the X-direction and the Y-direction, respectively. The magnets in each row and column are arranged according to a Halbach array, i.e. the magnetic orientation of successive magnets in each row and each column rotates 90 DEG counter-clockwise. The second part comprises an electric coil system ( 712 ) with two types of electric coils, one type having an angular offset of +45 DEG , and the other type having an offset of -45 DEG with respect to the X-direction. The first part ( 714, 710 ) is movable over a range of centimeters or more with respect to the stationary second part ( 712 ). For high precision positioning of the first part, an interferometer system ( 731, 730 ) is provided

Direct 3-D method for performance prediction of a linear moving coil actuator with various topologies

The direct three-dimensional (3-D) method represents the mathematical assembly of the magnetic field of separate cuboidal magnets and the vectors of the coil current density of a linear moving coil actuator within the global space. The mathematical description allows the variation of the design parameters of the actuator and the position of the coils with respect to the magnet array. The presented method describes a complete analytical derivation of the 3-D magnetic field and coil current. A numerical integration is applied to obtain the forces and torques appearing in a six degrees-of-freedom actuator as functions of the relative position of the coils with respect to the magnets in the 3-D space. The method and its governing equations are implemented as a rapid-design computational tool in Mathcad, and the simulation results are experimentally verified