2 research outputs found
Implantable Photonic Neural Probes with 3D-Printed Microfluidics and Applications to Uncaging
Advances in chip-scale photonic-electronic integration are enabling a new
generation of foundry-manufacturable implantable silicon neural probes
incorporating nanophotonic waveguides and microelectrodes for optogenetic
stimulation and electrophysiological recording in neuroscience research.
Further extending neural probe functionalities with integrated microfluidics is
a direct approach to achieve neurochemical injection and sampling capabilities.
In this work, we use two-photon polymerization 3D printing to integrate
microfluidic channels onto photonic neural probes, which include silicon
nitride nanophotonic waveguides and grating emitters. The customizability of 3D
printing enables a unique geometry of microfluidics that conforms to the shape
of each neural probe, enabling integration of microfluidics with a variety of
existing neural probes while avoiding the complexities of monolithic
microfluidics integration. We demonstrate the photonic and fluidic
functionalities of the neural probes via fluorescein injection in agarose gel
and photoloysis of caged fluorescein in solution and in flxed brain tissue
Microcantilever-integrated photonic circuits for broadband laser beam scanning
Laser beam scanning is central to many applications, including displays,
microscopy, three-dimensional mapping, and quantum information. Reducing the
scanners to microchip form factors has spurred the development of
very-large-scale photonic integrated circuits of optical phased arrays and
focal plane switched arrays. An outstanding challenge remains to simultaneously
achieve a compact footprint, broad wavelength operation, and low power
consumption. Here, we introduce a laser beam scanner that meets these
requirements. Using microcantilevers embedded with silicon nitride nanophotonic
circuitry, we demonstrate broadband, one- and two-dimensional steering of light
with wavelengths from 410 nm to 700 nm. The microcantilevers have ultracompact
~0.1 mm areas, consume ~31 to 46 mW of power, are simple to control, and
emit a single light beam. The microcantilevers are monolithically integrated in
an active photonic platform on 200-mm silicon wafers. The
microcantilever-integrated photonic circuits miniaturize and simplify light
projectors to enable versatile, power-efficient, and broadband laser scanner
microchips