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1 research outputs found
Lateral resolution in focused electron beam-induced deposition: scaling laws for pulsed and static exposure
Author
A Fernández-Pacheco
Aleksandra Szkudlarek
+14Â more
ChH Schwalb
ChJ Lobo
Czesław Kapusta
F Kolb
I Utke
Ivo Utke
JD Fowlkes
M Gabureac
M Gavagnin
M Huth
MG Lassiter
R Winkler
WF Dorp van
Wojciech Szmyt
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
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