Optical Properties of TiO 2 Thin Films Grown by PLD

Abstract Titanium dioxide thin …lms have been grown by pulsed laser deposition (PLD) under a …ne tuning of the deposition parameters, such as the substrate temperature, gas pressure, or the application of special treatments, e.g. RF-plasma assistance conditions. The main concern during the deposition process/treatments has been to obtain a high reproducibility and well de…ned optical and topographic properties. The emerging TiO 2 thin …lms have been analyzed with respect to the above mentioned properties by Atomic Force Microscopy (AFM) and Spectroscopic Ellipsometry (SE)