10 research outputs found
Low bias dry etching of III-nitrides in Cl2-based inductively coupled plasmas
- Author
- C. B. Vartuli
- C. Constantine
- C. R. Abernathy
- C.B. Vartuli
- C.B. Vartuli
- C.R. Abernathy
- C.R. Abernathy
- F. Ren
- H. Lee
- H.P. Gillis
- Hyun Cho
- I. Adesida
- J. Burm
- J. D. Mackenzie
- J.W. Lee
- L. Zhang
- M. Vernon
- M.A. Khan
- M.A. Khan
- M.E. Lin
- O. Aktas
- R. J. Shul
- R.J. Shul
- R.J. Shul
- S. J. Pearton
- S. M. Donovan
- S.C. McNevin
- S.J. Pearton
- S.J. Pearton
- S.J. Pearton
- S.M. Donovan
- U.K. Chakrabarti
- W. Pletschen
- Y.F. Wu
- Y.F. Wu
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
No full textDry Etching of Gallium Nitride and Related Materials
- Author
- A. H. Akasaki
- A. Osinsky
- A.T. Ping
- A.T. Ping
- A.T. Ping
- A.T. Ping
- A.T. Ping
- A.T. Ping
- B. Humphreys
- C. Constantine
- C. Constantine
- C.B. Vartuli
- C.B. Vartuli
- C.B. Vartuli
- C.B. Vartuli
- C.B. Vartuli
- C.B. Vartuli
- C.B. Vartuli
- C.B. Vartuli
- C.R. Abernathy
- C.R. Eddy Jr
- D.G. Lishan
- E.R. Brown
- F. Ren
- F. Ren
- F. Ren
- F. Ren
- F. Ren
- F. Ren
- F. Ren
- F.A. Ponce
- F.A. Ponce
- Ferguson
- G. Xu
- G.E. Bulman
- G.E. Bulman
- G.F. McLane
- G.F. McLane
- H. Cho
- H. Cho
- H. Cho
- H. Cho
- H. Cho
- H. Lee
- H. Morkoc
- H. Morkoc
- H.P. Gillis
- H.P. Gillis
- H.P. Gillis
- H.S. Kim
- I. Adesida
- I. Adesida
- J. Han
- J. Han
- J.C. Carrano
- J.C. Zolper
- J.I. Pankove
- J.M. Hove Van
- J.M. Hove Van
- J.M. Hove Van
- J.M. Hove Van
- J.M. Lee
- J.W. Lee
- J.W. Lee
- J.W. Lee
- J.W. Lee
- K. Itaya
- Kuramata
- L. Zhang
- L. Zhang
- M. Meyyappan
- M. Suzuki
- M. Suzuki
- M.A. Khan
- M.A. Khan
- M.A. Khan
- M.A. Khan
- M.A. Khan
- M.A. Khan
- M.E. Lin
- M.E. Lin
- M.P. Mack
- M.P. Mack
- M.S. Shur
- N. Morkoc
- O. Aktas
- P. Gillis
- P.H. Nam
- R. Hickman
- R. Hickman
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.J. Shul
- R.T. Leonard
- S. Chichibu
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S. Strike
- S.A. Smith
- S.C. Binari
- S.C. Binari
- S.J. Pearton
- S.J. Pearton
- S.J. Pearton
- S.J. Pearton
- S.J. Pearton
- S.J. Pearton
- S.N. Mohammad
- S.N. Mohammad
- T.R. Hayes
- W. Kruppa
- W.A. Harrison
- W.W. Chow
- Y. Kato
- Y. Narukawa
- Y. Narukawa
- Y.B. Hahn
- Y.F. Wu
- Y.H. Lee
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- 01/01/2006
- Field of study
No full textActivation annealing of Si-implanted GaN up to 1500°C using a novel RTP technique
- Author
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
No full textIon implantation and rapid thermal processing of Ill-V nitrides
- Author
- C. B. Vartuli
- C. R. Abernathy
- C. Yuan
- C.B. Vartuli
- J. C. Zolper
- J. Karpinski
- J.C. Zolper
- J.C. Zolper
- J.C. Zolper
- J.C. Zolper
- J.I. Pankove
- J.I. Pankove
- K.D. Cummings
- K.K. Patel
- M. Furtada
- M. Hagerott Crawford
- M.A. Khan
- M.A. Khan
- M.A. Khan
- M.E. Sherwin
- N. Newman
- R. A. Stall
- R. Groh
- R.J. Molnar
- S. J. Pearton
- S. Nakamura
- S. Strite
- S.J. Pearton
- S.J. Pearton
- S.J. Pearton
- S.J. Pearton
- S.J. Pearton
- T.Y. Tan
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
No full textEtch characteristics of GaN and BN materials in chlorine-based plasmas
- Author
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
No full textUV-photoassisted etching of GaN in KOH
- Author
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
No full textLow resistive ohmic contact formation on surface treated-n-GaN alloyed at low temperature
- Author
- B.P. Luther
- B.P. Luther
- C.B. Vartuli
- C.D. Tsai
- C.T. Lee
- C.T. Lee
- C.T. Lee
- C.T. Wu
- Ching-Ting Lee
- D.K. Schroder
- Fu-Tsai Hwang
- H. Amano
- Hsin-Ying Lee
- J. Burm
- J.C. Zolper
- J.K. Kim
- J.L. Lee
- J.S. Foresi
- L.L. Smith
- M. Ben-Tzur
- M.A. Khan
- M.A. Khan
- M.E. Lin
- S. Nakamura
- S. Ruvimov
- S.C. Binari
- S.P. Kowalczyk
- Y.J. Lin
- Y.J. Lin
- Yow-Jon Lin
- Z. Fan
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
No full textSurface recombination and sulfide passivation of GaN
- Author
- A. Kapila
- A.C. Schmitz
- B. J. Skromme
- B.J. Skromme
- C. Youtsey
- C.B. Vartuli
- C.I. Wu
- C.J. Sandroff
- C.J. Spindt
- D.E. Aspnes
- E. Yablonovitch
- E.V. Kalinina
- G. L. Martinez
- H. Morkoç
- H. Sugahara
- H.L. Chuang
- J.L. Freeouf
- L. Pauling
- L.L. Smith
- M. R. Curiel
- M.S. Carpenter
- P. Hacke
- R. Iyer
- R. J. Molnar
- R.J. Molnar
- S. Evoy
- S.M. Sze
- V.N. Bessolov
- V.N. Bessolov
- Y. Wada
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
No full textFormation of dry etched gratings in GaN and InGaN
- Author
- A.T. Ping
- C. R. Abernathy
- C.B. Vartuli
- C.R. Abernathy
- C.R. Abernathy
- D. V. Podlesnik
- D.L. Flamm
- F. Ren
- F. Ren
- G.F. McLane
- G.P. Agrawal
- H. Lee
- I. Adesida
- I. Akasaki
- J. Abe
- J. D. Mackenzie
- J. Hecht
- J. Hong
- J. W. Lee
- J. Yuba
- K. Huata
- M.E. Lin
- P. F. Sciortino
- R.J. Shul
- R.J. Shul
- S. J. Pearton
- S. Nakamura
- S. Nakamura
- S. Nakamura
- S.J. Pearton
- S.J. Pearton
- V.M. Donnelly
- W. Pletschen
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
No full textPulsed laser deposition and processing of wide band gap semiconductors and related materials
- Author
- A. A. Iliadis
- A. Inam
- A. Ohtomo
- A. Patel
- A.M. Dhote
- A.T. Ping
- C.B. Vartuli
- D.C. Reynolds
- D.M. Bagnall
- F. Hamdani
- H. Morkoç
- I. Akasaki
- J.A. Edmond
- J.M. Hvam
- J.M. Hvam
- J.N. Kuznia
- J.S. Foresi
- K. A. Jones
- L. Salamancariba
- M. Kawasaki
- M.A. Khan
- M.A. Khan
- M.E. Lin
- M.J. Paisley
- M.K. Kelly
- N.H. Karam
- O.H. Nam
- P. Kung
- P. Kung
- R. D. Vispute
- R. Enck
- R. P. Sharma
- R.C. Powell
- R.D. Vispute
- R.D. Vispute
- R.D. Vispute
- R.D. Vispute
- R.D. Vispute
- R.F. Xiao
- R.J. Molnar
- R.J. Shul
- R.J. Shul
- S. Bloom
- S. Choopun
- S. Hara
- S. N. Andronescu
- S. Nakamura
- S. Nakamura
- S. Yoshida
- S.M. Sze
- S.R. Smith
- T. Huang
- T. Venkatesan
- V. Talyansky
- V. Talyansky
- W. Kim
- W. L. Sarney
- W. Qian
- W. Qian
- Z. Yang
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study
No full text
