Improvement of Depth Resolution in Secondary Ion Mass Spectrometry Analysis Using Multiresolution Deconvolution

Multiresolution deconvolution (MD), based on Tikhonov-Miller regularization and wavelet transformation, was developed and applied to improve the depth resolution of secondary ion mass spectrometry (SIMS) profiles. Both local application of the regularization parameter and shrinking the wavelet coefficients of blurred and estimated solutions at each resolution level in MD provide to smoothed results without the risk of generating artifacts related to noise content in the profile. This led to a significant improvement in the depth resolution. The SIMS profiles were obtained by analysis of delta layers of boron in a silicon matrix using a Cameca-lms6f instrument. The results obtained by using the MID algorithm are compared to those obtained by monoresolution deconvolution which is Tikhonov-Miller regularization with a model of solution (TMMS). Finally, the advantages and limitations of the MD algorithm are presented and discussed. (C) 2009 The Japan Society of Applied Physic

New approach for improvement of secondary ion mass spectrometry profile analysis

In this paper, we describe the improvement of secondary ion mass spectrometry (SIMS) profile analysis by a new approach based on partial deconvolution combined with scale-frequency shrinkage. The SIMS profiles are obtained by analysis of the delta layers of boron doped silicon in a silicon matrix, analyzed using Cameca-Ims6f at oblique incidence. These profiles can be approximated closely by exponential-like tail distributions with decay length, which characterizes the collisional mixing effect. The partial deconvolution removes the residual ion mixing effect. The contributions of high-frequency noise are removed by shrinkage to a great extent of the profiles. It is shown that this approach leads to a marked improvement in depth resolution without producing artifacts and aberrations caused principally by noise. Furthermore, it is shown that the asymmetry of the delta layers, caused by the collisional mixing effect, is completely removed, the decay length is decreased by a factor of 4 compared with that before deconvolution

Tikhonov-Miller regularization with a denoisy and deconvolved signal as model of solution for improvement of depth resolution in SIMS analysis

In this paper the improvement by deconvolution of the depth resolution in Secondary Ion Masse Spectrometry (SIMS) analysis is studied. Indeed, a new Tikhonov-Miller deconvolution method, where a priori model of solution is included. The latter is a denoisy and pre-deconvolved signal obtained firstly by the application of wavelet shrinkage algorithm and after, by the introduction of the obtained denoisy signal in an iterative deconvolution algorithm. The results of the proposed algorithm are compared to those of Tikhonov-Miller regularization where the model of solution is a raw signal. Finally, based on the obtained results the advantages and limitations of the proposed method as well as suggestions for future work are presented and discussed.Anglai