Design of waveguides, bends and splitters in photonic crystal slabs with hexagonal holes in a triangular lattice

Waveguides in photonic crystal slabs (PCS) can be obtained by omitting a row of holes (W1-waveguides). In general the propagation properties in such waveguides suffer from the unavoidable periodic sidewall corrugation caused by the remaining parts of the crystal. The corrugation acts as a Bragg reflector, causing the occurrence of so-called mini stopbands in the transmission of the waveguide. The effect is quite strong in PCS with circular holes, but it can be significantly reduced if correctly oriented hexagonal holes are used. This so-called hexagon-type PCS allows the design of waveguides, bends and splitters having a relatively high group velocity and a wide transmission window in the PCS stopband for modes having their magnetic field oriented mainly perpendicular to the slab

Waveguides, bends and Y-junctions with improved transmission and bandwidth in hexagon-type SOI photonic crystal slabs

This paper presents novel ways of implementing waveguide components in photonic crystal slabs based on silicon-on-insulator (SOI). The integration platform we consider consists of hexa¬gonal holes arranged in a triangular lattice (‘hexagon-type’ photonic crystal). The waveguides are made of one missing row of holes (W1) with triangular air inclusions symmetrically added on each side of the waveguide. \ud Size and position of these inclusions are tuning parameters for the band diagram and can be used for minimizing the distributed Bragg reflection (DBR) effect. The waveguides show single-mode behavior with reasonably high group velocity and large transmission window, inside the gap between H-like modes**. These waveguides, closely resembling conventional ridge waveguides, can be combined to form efficient bends and Y-junctions. The bends and Y-junctions include intermediate short waveguide sections at half the bend angle playing the role of corner ‘mirrors’. Qualitative design rules were obtained from 2D calculations based on effective index approximation.\u

Alignment issues in photonic crystal device fabrication

An important requirement in the fabrication of photonic crystal structures is the correct relative alignment of structural elements. Accuracy should be in the order of some tens of nanometres. Some of the options for providing such accuracy are discussed. Examples are given of aligning defects with respect to a predefined 2D lattice, aligning access waveguides with respect to a small local photonic crystal structure, and the alignment of successive periodically structured layers in a 3D "woodpile" structure

Realization of 2-dimensional air-bridge silicon photonic crystals by focused ion beam milling and nanopolishing

We report the design and fabrication of small photonic crystal structures which are combined with conventional dielectric ridge waveguides. We describe in details the fabrication of both rough and smooth membranes, which are used as host for photonic crystals. Two Focused Ion Beam milling experiments are highlighted: the first one shows how photonic crystals can be fast and accurate milled into a Si membrane, whereas the second experiment demonstrates how focused ion beam milling can turn a rough surface into a well-patterned nano-smooth surface. The previously ultra rough surface showed no detectable roughness after milling due to the nanopolishing effect of the focused ion beam milling

Fast prototyping of planar photonic crystal components using a combination of optical lithography and focused ion beam etching

A combination of conventional optical lithography and focused ion beam etching provides a novel method for fast and precise (10 nm accuracy) prototyping of planar photonic crystal structures having submicron features, in silicon on insulator wafers

An Electrochemical Oxygen Pump Model – A Tool for Sensor Optimization

AbstractElectrochemical oxygen pump sensors are increasingly important in a range of industrial sensing applications. However, their development has traditionally been based on inefficient empirical approaches. We have built a detailed finite-element model of an oxygen pump electrochemical sensor that is able to simulate the distribution of oxygen within sensor components under a range of conditions. This has been used to predict key performance parameters such as the steady state output current as a function of oxygen concentration, the startup characteristics and the transient response to a step change in oxygen concentration. The model is a powerful tool enabling multiple design concepts to be compared without the need for time consuming prototype sensor construction

Design and fabrication of line-defect waveguides in hexagon-type SOI photonic crystal slabs

We present a novel design approach for line-defect waveguides integrated in a photonic crystal slab (PCS) with hexagonal holes in a triangular lattice (aka 'hexagon-type'). Triangular air inclusions are symmetrically added on each side of the waveguide. Size and position of these inclusions are tuning parameters for the band diagram and can be used for minimizing the distributed Bragg reflection (DBR) effect. The waveguides show single-mode behavior with reasonably high group velocity and large transmission window, inside the gap between even-like modes. Qualitative design rules were obtained from 2D calculations based on effective index approximation and full 3D calculations of the band structure were applied for fine-tuning of structural parameters of these high-index contrast systems. Transmission spectra and losses of finite-sized structures were estimated by means of 3D finite-difference time domain (FDTD) calculations. We present a pattern definition technique, which is an integration of optical lithography with focused ion beam (FIB) high-resolution etching. The mask pattern is transferred into the SOI stack by a subsequent reactive ion etching (RIE) process. The combination of moderate resolution optical lithography and FIB etching provides an excellent tool for fast prototyping of PCS-based devices