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3 research outputs found
EUV sources using Xe and Sn discharge plasmas
Author
Aleksander S Ivanov
Aleksander V Eltsov
+29Â more
Aleksander V Prokofiev
Aleksander Yu Vinokhodov
Arhipov N I
Artsimovich L A
Borisov V
Borisov V
Borisov V
Borisov V M
Borisov V M
Borisov V M
Borisov V M Khristoforov O B
Fomenkov V
Koshelev K
Kusunose H
McGeoch M W Pike C T
O'Sulivan G
Oleg B Khristoforov
Osa S
Pankert J
Richardson M
Stamm U
Stamm U
Teramoto Y
Valentin A Mishchenko
Vasiliev V I
Vladimir A Vodchits
Vladimir M Borisov
Wang X J
Yuriy B Kiryukhin
Publication venue
'IOP Publishing'
Publication date
Field of study
Full text link
Crossref
Creation and investigation of powerful EUV sources (λ ≈ 13.5 nm)
Author
A. F. TseluÄko
A. S. Ivanov
+18Â more
A. S. Ivanov
A. V. Prokofiev
A. Yu. Vinokhodov
G. N. Borisova
J. Jonkers
K. N. Koshelev
K. N. Koshelev
M. Corthout
O. B. Khristoforov
U. Stamm
V. A. Mishchenko
V. M. Borisov
V. M. Borisov
V. M. Borisov
V. M. Borisov
Yu. B. Kiryukhin
Yu. Teramoto
Yu. Tolstikhina
Publication venue
'Pleiades Publishing Ltd'
Publication date
Field of study
No full text
Crossref
High-power gas-discharge EUV source
Author
A. S. Ivanov
A. V. Prokof’ev
+14Â more
A. Yu. Vinokhodov
G. Shriever
J. P. Benchop
K. Bergmann
M. A. Klosner
M. W. McGeoch
O. B. Khristoforov
S. V. Mironov
V. A. Mishchenko
V. Banine
V. M. Borisov
V. M. Borisov
W. Partlo
Yu. B. Kiryukhin
Publication venue
'Pleiades Publishing Ltd'
Publication date
Field of study
No full text
Crossref