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1 research outputs found
Epitaxial growth of B-doped Si on Si(100) by electron-cyclotron-resonance Ar plasma chemical vapor deposition in a SiH4–B2H6–H2 gas mixture without substrate heating
Author
Baert
Blucea
+14Â more
Damon-Lacoste
Junichi Murota
Masao Sakuraba
Matsuo
Matsuoka
Murota
Muto
Sakuraba
Sakuraba
Sakuraba
Shahrjerdi
Takahashi
Vatel
Yusuke Abe
Publication venue
'Elsevier BV'
Publication date
Field of study
No full text
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