82 research outputs found
First lithographic results from the extreme ultraviolet Engineering Test Stand
The extreme ultraviolet ͑EUV͒ Engineering Test Stand ͑ETS͒ is a step-and-scan lithography tool that operates at a wavelength of 13.4 nm. It has been developed to demonstrate full-field EUV imaging and acquire system learning for equipment manufacturers to develop commercial tools. The initial integration of the tool is being carried out using a developmental set of projection optics, while a second, higher-quality, projection optics is being assembled and characterized in a parallel effort. We present here the first lithographic results from the ETS, which include both static and scanned resist images of 100 nm dense and isolated features throughout the ring field of the projection optics. Accurate lithographic models have been developed and compared with the experimental results
Study of the steady-state current at tubular electrodes in the micromolar concentration region
Nonbiological Inhibition-Based Sensing (NIBS) Demonstrated for the Detection of Toxic Sulfides
Application of anion-exchange resin-loaded filters to the x-ray fluorescence determination of sulfate
Determination of Enzyme Activity in Biological Fluids by Means of the Electrochemical Oxidation of NADH at a Modified Glassy Carbon Electrode
Effects of adsorption, electrode material, and operational variables on the oxidation of dihydronicotinamide adenine dinucleotide at carbon electrodes
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