NuSTAR ground calibration: The Rainwater Memorial Calibration Facility (RaMCaF)

The Nuclear Spectroscopic Telescope Array (NuSTAR) is a NASA Small Explorer mission that will carry the first focusing hard X-ray (5-80 keV ) telescope to orbit. The ground calibration of the three flight optics was carried out at the Rainwater Memorial Calibration Facility (RaMCaF) built for this purpose. In this article we present the facility and its use for the ground calibration of the three optics

First lithographic results from the extreme ultraviolet Engineering Test Stand

The extreme ultraviolet ͑EUV͒ Engineering Test Stand ͑ETS͒ is a step-and-scan lithography tool that operates at a wavelength of 13.4 nm. It has been developed to demonstrate full-field EUV imaging and acquire system learning for equipment manufacturers to develop commercial tools. The initial integration of the tool is being carried out using a developmental set of projection optics, while a second, higher-quality, projection optics is being assembled and characterized in a parallel effort. We present here the first lithographic results from the ETS, which include both static and scanned resist images of 100 nm dense and isolated features throughout the ring field of the projection optics. Accurate lithographic models have been developed and compared with the experimental results