Sensors for biomedical applications

This paper considers the impact during the last decade of modern IC technology, microelectronics, thin- and thick-film technology, fibre optic technology, etc. on the development of sensors for biomedical applications

Prediction of the dynamic response of the potentiometric carbon dioxide electrode

The dynamic behaviour of the potentiometric carbon dioxide electrode is predicted by means of a digital simulation that considers both diffusion and reaction kinetics. The method allows for complete description of the electrode response without requiring the assumption that one of these processes can be neglected. The validity of the simulation was tested experimentally by using a commercial pCO2 electrode provided with various silicone rubber and teflon membranes. The measured values are in good agreement with those of the simulation

A polymer condenser microphone on silicon with on-chip cmos amplifier

In this paper the development of a capacitive microphone with integrated preamplifier is described. The condenser microphone is made by micromachining of polyimide on silicon, and is compatible with CMOS technology. Therefore, the structure can be realised by post processing on substrates containing integrated circuits, independently of the IC process. Microphones with a required DC bias voltage of 4 V have been realised on a CMOS substrate containing PMOS buffer preamplifiers. From the measurements on these structures, it is illustrated how an immediate improvement of 4.8 dB of the microphone sensitivity and noise level can be obtained by using the integrated preamplifier. The measured sensitivity of the integrated condenser microphone was 2.5 mV/Pa and the equivalent noise level (ENL) was 29.5 dB(A) SP

A bi-directional electrochemically driven micro liquid dosing system with integrated sensor/actuator electrodes

In this contribution a micro liquid dosing system is presented, which allows bi-directional manipulation of fluids (i.e. pushing out and pulling in of liquids) by the electrochemical generation and removal of gas bubbles. Bi-directionality is obtained by reversal of the actuation current thereby causing the earlier produced gasses to react back to water. This reduction of gas volume actively pulls liquid back into the system. The electrochemical actuator electrodes have been specially designed to perform the simultaneous measurement of conductivity, via which the total amount of gas can be estimated. As this amount equals the total dosed volume of liquid, dispensed volumes can be determined on-line during experiment

High-performance condenser microphone with fully integrated CMOS amplifier and DC-DC voltage converter

The development of a capacitive microphone with an integrated detection circuit is described. The condenser microphone is made by micromachining of polyimide on silicon. Therefore, the structure can be realized by postprocessing on substrates containing integrated circuits (IC's), independently of the IC process, integrated microphones with excellent performances have been realized on a CMOS substrate containing dc-dc voltage converters and preamplifiers. The measured sensitivity of the integrated condenser microphone was 10 mV/Pa, and the equivalent noise level (ENL) was 27 dB(A) re. 20 ¿Pa for a power supply voltage of 1.9 V, which was measured with no bias voltage applied to the microphone. Furthermore, a back chamber of infinite volume was used in all reported measurements and simulation

An ISFET-based microlitre titrator: integration of a chemical sensor—actuator system

This paper describes the integration of pH-sensitive ISFETs with a coulometric pH-actuator system. The coulometric analyser is able to perform acid—base titrations in microlitre samples at high speed. Combination of chemical sensors with a corresponding actuator eliminates the need for frequent calibration and thus may increase the applicability of solid-state chemical transducers. A number of possible measuring methods are described

The design, fabrication, and testing of corrugated silicon nitride diaphragms

Silicon nitride corrugated diaphragms of 2 mm×2 mm×1 ¿m have been fabricated with 8 circular corrugations, having depths of 4, 10, or 14 ¿m. The diaphragms with 4-¿m-deep corrugations show a measured mechanical sensitivity (increase in the deflection over the increase in the applied pressure) which is 25 times larger than the mechanical sensitivity of flat diaphragms of equal size and thickness. Since this gain in sensitivity is due to reduction of the initial stress, the sensitivity can only increase in the case of diaphragms with initial stress. A simple analytical model has been proposed that takes the influence of initial tensile stress into account. The model predicts that the presence of corrugations increases the sensitivity of the diaphragms, because the initial diaphragm stress is reduced. The model also predicts that for corrugations with a larger depth the sensitivity decreases, because the bending stiffness of the corrugations then becomes dominant. These predictions have been confirmed by experiments. The application of corrugated diaphragms offers the possibility to control the sensitivity of thin diaphragms by geometrical parameters, thus eliminating the effect of variations in the initial stress, due to variations in the diaphragm deposition process and/or the influence of temperature changes and packaging stres