1 research outputs found
New combined PIC-MCC approach for fast simulation of a radio frequency discharge at low gas pressure
A new combined PIC-MCC approach is developed for accurate and fast simulation
of a radio frequency discharge at low gas pressure and high density of plasma.
Test calculations of transition between different modes of electron heating in
a ccrf discharge in helium and argon show a good agreement with experimental
data.
We demonstrate high efficiency of the combined PIC-MCC algorithm, especially
for the collisionless regime of electron heating.Comment: 6 paged, 8 figure