Testing of the sensing element of a capacitive micromechanical accelerometer

Sensing element is one of the main parts of a micromechanical accelerometer. It determines a lot of parameters of the whole device. Its design flow is a complex process including the steps from the analysis of technical and technological requirements to testing the manufactured devices. Testing is one of the most important steps because it allows not only getting the final characteristics of the chip, but also verifying and specifying the mathematical model of the sensing element for future designs. The paper presents the results of micromechanical accelerometer sensing element testing. Special attention is given to the steps of wafer-level testing and testing with an integrated circuit in the accelerometer