5 research outputs found
High Performance, Continuously Tunable Microwave Filters using MEMS Devices with Very Large, Controlled, Out-of-Plane Actuation
Software defined radios (SDR) in the microwave X and K bands offer the
promise of low cost, programmable operation with real-time frequency agility.
However, the real world in which such radios operate requires them to be able
to detect nanowatt signals in the vicinity of 100 kW transmitters. This imposes
the need for selective RF filters on the front end of the receiver to block the
large, out of band RF signals so that the finite dynamic range of the SDR is
not overwhelmed and the desired nanowatt signals can be detected and digitally
processed. This is currently typically done with a number of narrow band
filters that are switched in and out under program control. What is needed is a
small, fast, wide tuning range, high Q, low loss filter that can continuously
tune over large regions of the microwave spectrum. In this paper we show how
extreme throw MEMS actuators can be used to build such filters operating up to
15 GHz and beyond. The key enabling attribute of our MEMS actuators is that
they have large, controllable, out-of-plane actuation ranges of a millimeter or
more. In a capacitance-post loaded cavity filter geometry, this gives
sufficient precisely controllable motion to produce widely tunable devices in
the 4-15 GHz regime.Comment: 12 pages 14 figures 2 table
Mems device with large out-of-plane actuation and low-resistance interconnect and methods of use
Source: United States Patent and Trademark Office, www.uspto.gov”The present application is directed to a MEMS device. The MEMS device includes a substrate having a first end and a second end extending along a longitudinal axis, the Substrate including an electrostatic actuator. The device also includes a movable plate having a first end and a second end. The device also includes a thermal actuator having a first end coupled to the first end of the substrate and a second end coupled to the first end of the plate. The actuator moves the plate in relation to the substrate. Further, the device includes a power source electrically coupled to the thermal actuator and the Substrate. The application is also directed to a method for operating a MEMS device
High Performance, Continuously Tunable Microwave Filters Using MEMS Devices With Very Large, Controlled, Out-of-Plane Actuation
Software defined radios (SDR) in the microwave X- and K-bands offer the promise of low cost, programmable operation with real-time frequency agility. However, the real world in which such radios operate requires them to be able to detect nanowatt signals in the vicinity of 100 kW transmitters. This imposes the need for selective RF filters on the front end of the receiver to block the large, out of band RF signals so that the finite dynamic range of the SDR is not overwhelmed and the desired nanowatt signals can be detected and digitally processed. This is currently typically done with a number of narrow band filters that are switched in and out under program control. What is needed is a small, fast, wide tuning range, high Q, and low loss filter that can continuously tune over large regions of the microwave spectrum. In this paper, we show how extreme throw MEMS actuators can be used to build such filters operating up to 15 GHz and beyond. The key enabling attribute of our MEMS actuators is that they have large, controllable, and out-of-plane actuation ranges of a millimeter or more. In a capacitance-post loaded cavity filter geometry, this gives sufficient precisely controllable motion to produce widely tunable devices in the 4-15 GHz regime