Spatial Atomic Layer Deposition of Alumina-based Thin Film Encapsulation for High Performance Perovskite Solar Cells

In this thesis, various alumina-based thin-film encapsulation layers including nitrogen-doped alumina, zinc-doped alumina and ZnO/Al2O3 nanolaminate structures are deposited by atmospheric-pressure spatial atomic layer deposition (AP-SALD) to investigate their deposition rate, microstructure, and barrier properties. Moreover, the thin-film composition is optimized to maximize the PSC long-term stability in harsh environmental conditions

Highly Sensitive Self-Actuated Zinc Oxide Resonant Microcantilever Humidity Sensor

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Nanoscale Film Thickness Gradients Printed in Open Air by Spatially Varying Chemical Vapor Deposition

International audienc

Nanoscale Film Thickness Gradients Printed in Open Air by Spatially Varying Chemical Vapor Deposition

International audienc