215 research outputs found

    Investigation of the stresses in continuous thin films and patterned lines by x-ray diffraction

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    Strains and stresses in aluminum thin films and patterned lines were measured using x-ray diffraction. Measurements were performed on pure aluminum and on ion-implanted aluminum, as annealed and six months after an annealing treatment. The results suggest that stresses in passivated lines, starting from an unequitriaxial state of stress, show the tendency to relax in the direction of an equitriaxial state of stress, depending on the ratio of grain size and linewidth or film thickness. The relaxation is particularly rapid in ion-implanted aluminum lines, in contradiction to the expected strengthening effect. Possible implications for electromigration resistance are discussed

    Brittle-to-ductile transition in ultrathin Ta/Cu film systems

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    Current semiconductor technology demands the use of compliant substrates for flexible integrated circuits. However, the maximum total strain of such devices is often limited by the extensibility of the metallic components. Although cracking in thin films is extensively studied theoretically, little experimental work has been carried out thus far. Here, we present a systematic study of the cracking behavior of 34- to 506-nm-thick Cu films on polyamide with 3.5-to 19-nm-thick Ta interlayers. The film systems have been investigated by a synchrotron-based tensile testing technique and in situ tensile tests in a scanning electron microscope. By relating the energy release during cracking obtained from the stress-strain curves to the crack area, the fracture toughness of the Cu films can be obtained. It increases with Cu film thickness and decreases with increasing Ta film thickness. Films thinner than 70 nm exhibit brittle fracture, indicating an increasing inherent brittleness of the Cu film

    Fibrillar Elastomeric Micropatterns Create Tunable Adhesion Even to Rough Surfaces

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    Acknowledgements V.B., N.K.G., and E.A. contributed with conception and experimental design. V.B. performed the experiments. V.B., R.H., A.G., and R.M.M. carried out analysis and interpretation of data. V.B., R.H., A.G., and E.A. wrote the manuscript. V.B. and R.H. contributed equally to this work. V.B. acknowledges funding by SPP 1420 of the German Science Foundation DFG. E.A., N.K.G., and R.H. acknowledge funding from the European Research Council under the European Union/ERC Advanced Grant “Switch2Stick,” Agreement No. 340929.Peer reviewedPublisher PD

    Internal friction in F.C.C. alloys due to solute drag on dislocations. - I. : A model for the effect of core diffusion

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    The internal friction (mechanical loss) behavior of dislocations is studied in a model which, for the first time, considers the substitutional solute mobility in the dislocation core to be higher than in the bulk around it. The parameters investigated include the external stress sigma xy, the solute concentration c0, the pinning length of the dislocation and the temperature. It is shown that, at low c0 and high sigma xy, the kinetics of the dislocation motion is determined by the fast diffusion of the solute atoms in the core, while for high c0 and low sigma xy, the diffusion of the atoms far away from the dislocation is rate-limiting. The results are compared with the analytica model of Schoeck and are applied to the alloy system Al-Si. New experimental results supporting the model are described in a companion paper (Paper II)
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