MEMS Compact Modeling Meets Model Order Reduction: Examples of the

Modeling and simulation of the behavior of a system consisting of many single devices is an essential requirement for the reduction of design cycles in the development of microsystem applications. Analytic solutions for the describing partial differential equations of each component are only available for simple geometries. For complex geometries, either approximations or numerical methods can be used. However, the numerical treatment of the PDEs of thousands of interconnected single devices with each exhibiting a complex behavior is almost impossible without reduction of the order of unknowns to a lower-dimensional system. We present a fully automatic method to generate a compact model of second-order linear systems based on the Arnoldi process, and provide an example of successfull model order reduction to a gyroscope