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1 research outputs found
Thin-film (Al)BCN materials synthesized by sequential precursor pulses to mimic atomic layer deposition
Author
Aarnink Antonius A.I.
Apaydin Ramazan O.
+3Â more
De Jong Michel P.
Gravesteijn Dirk J.
Kovalgin Alexey Y.
Publication venue
Publication date
01/02/2023
Field of study
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University of Twente Research Information