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2 research outputs found

Focused Ion Beam Microfabrication

Author: Antoniadis Dimitri A.
Chiang Tony P.
Chu Alex
Chu Larry
Chu William
Chung James E.
Della Ratta Anthony D.
Etchin Sergey
Hartney Mark A.
Kazior Thomas E.
Lezec Henri J.
Liao Kenneth S.
Mahoney Leonard J.
Melngailis John
Musil Christian R.
Ro Jaesang
Shaver D. C.
Shimase Akira
Smith Henry I.
Sosonkina Jane
Thompson Carl V.
Vignaud Dominique
Xu Xin
Publication venue: Research Laboratory of Electronics (RLE) at the Massachusetts Institute of Technology (MIT)
Publication date
Field of study

Contains an introduction, reports on seven research projects and a list of publications.Defense Advanced Research Projects Agency/U.S. Army Research Office Contract DAAL03-88-K-0108National Science Foundation Grant ECS 89-21728U.S. Army Research Office Contract DAAL03-87-K-0126U.S. Navy - Naval Research Laboratory/Micrion Agreement M08774SEMATEC

DSpace@MIT

Two‐Dimensional Profile Simulation of Focused Ion‐Beam Milling of LSI

Author: Akira Shimase
Fumikazu Itoh
Satoshi Haraichi
Publication venue: 'The Electrochemical Society'
Publication date
Field of study

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