Properties of CrSi2 Layers Obtained by Rapid Heat Treatment of Cr Film on Silicon

The changes in the morphology and the electrophysical properties of the Cr/n-Si (111) structure depending on the rapid thermal treatment were considered in this study. The chromium films of about 30 nm thickness were deposited via magnetron sputtering. The rapid thermal treatment was performed by the irradiation of the substrate’s back side with the incoherent light flux of the quartz halogen lamps in nitrogen medium up to 200–550 ◦C. The surface morphology was investigated, including the grain size, the roughness parameters and the specific surface energy using atomic force microscopy. The resistivity value of the chromium films on silicon was determined by means of the four-probe method. It was established that at the temperatures of the rapid thermal treatment up to 350◦C one can observe re-crystallization of the chromium films with preservation of the fine grain morphology of the surface, accompanied by a reduction in the grain sizes, specific surface energy and the value of specific resistivity. At the temperatures of the rapid thermal treatment from 400 to 550◦C there originates the diffusion synthesis of the chromium disilicide CrSi2 with the wave-like surface morphology, followed by an increase in the grain sizes, roughness parameters, the specific surface energy and the specific resistivity value

A Bilateral Asymptotic Method of Solving the Integral Equation of the Contact Problem for the Torsion of an Elastic Halfspace Inhomogeneous in Depth

Contacts of indentors with functionally graded elastic solids may produce pressures significantly different from the results obtained for homogeneous elastic materials (Hertzian results). It is even more so for heavily loaded line elastohydrodynamically lubricated (EHL) contacts. The goal of the paper is to indicate two distinct ways the functionally graded elastic materials may alter the classic results for the heavily loaded line EHL contacts. Namely, besides pressure, the other two main characteristics which are influenced by the nonuniformity of the elastic properties of the contact materials are lubrication film thickness and frictional stress/friction force produced by lubricant flow. The approach used for analyzing the influence of functionally graded elastic materials on parameters of heavily loaded line EHL contacts is based on the asymptotic methods developed earlier by the authors such as Kudish Sci., 48(10),. More specifically, it is based on the analysis of contact problems for dry contacts of functionally graded elastic solids and the lubrication mechanisms in the inlet and exit zones as well as in the central region of heavily loaded lubricated contacts. The way the solution of the EHL problem for coated/functionally graded materials is obtained provides a very clear structure of the solution. The solution of the EHL problem in the Hertzian region is very close to the solution of the dry contact problem while in the inlet and exit zones the solutions of the EHL problem with the right asymptotes coming from the solution of the dry contact problem can be related to the solutions of the classic EHL problem for homogeneous materials