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1 research outputs found
Fundamental limitations of LIGA x-ray lithography: sidewall offset, slope and minimum feature size
Author
Aigeldinger G Ceremuga J T Skala D M
Betz H
+18Â more
De Carlo F
Ehrfeld W
Ehrfeld W
Feiertag G
Feldman M
Griffiths S K Crowell J A W
Lehockey E M
Munchmeyer D
Murata K
Murata K
Nilson R H
Nilson R H
Ocola L E
Pantenburg F J
Pantenburg F J Bankert M A Domeier L A Griffiths S K Wepfer K C
Pantenburg F J Griffiths S K
Stewart K Griffiths
Zumaque H
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'IOP Publishing'
Publication date
Field of study
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