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2 research outputs found
Atomistic Simulation of Si3N4 CVD from Dichlorosilane and NH3
Author
A Gonzalez-Lafont
A Omeltchenko
+88Â more
A Reyes-Serrato
A. Lekhollm
AA Bagatur’yants
AA Bagatur’yants
AA Korkin
AD Mclean
AY Liu
B.G. Willis
C Kleijn
C Moller
C-E Morosanu
C-E Morosanu
C-K Loong
CC Battaile
CM Wang
D.J
EW Schlag
F Mota
F. Brito Mota
G Mills
G Pacchioni
G Peev
G Reber
G Valente
G Zhai
G.L. Zhao
H Eyring
H Rabitz
H Simka
H Toraya
HNG Wadley
IG Pitt
J Niesmann
JA Wendal
JM Wittbrodt
JW Klaus
JW Klaus
K Kato
K.F. Roenigk
KF Jensen
KH Jack
L Kubler
LA Curtiss
M-D Su
M. Bjorkqvist
M.E. Bachlechner
M.T. Swihart
M.W. Schmidt
MD Allendorf
ME Bachlechner
MJ Frisch
MT Swihart
MT Swihart
P Avouris
P Vashishta
P Yang
PD Davides
PJ Robinson
R Grun
R.L. Jenkins
RE Weston
RG Gilbert
RK Kalia
RN Katz
RP Dickinson
RS Rosier
S Ishidzuka
S Koseki
S Koseki
S Koseki
S Yokoyama
S Yokoyama
S. Ishidzuka
ST Rodgers
T Sorita
T Watanabe
T. Ogata
TP Merchant
W-Y Ching
W.Y. Lee
WA Pliskin
WH Press
WY Ching
X Wang
XY Guo
Y Kusakabe
Y-N Xu
Y. Widjaja
Publication venue
'Springer Science and Business Media LLC'
Publication date
01/01/2004
Field of study
No full text
Crossref
Approaching Defect-free Amorphous Silicon Nitride by Plasma-assisted Atomic Beam Deposition for High Performance Gate Dielectric
Author
A Biberman
A Omeltchenko
+46Â more
A Sanne
AA Bagatur’yants
AM Goodman
BH Lee
C-L Wu
CJ Karlsson
E Atanassova
E Cartier
E Lidorikis
EP Gusev
G-M Rignanese
H-M Lee
HR Philipp
J Bauer
J Chen
J Kwo
J McPherson
J Robertson
J Robertson
J Robertson
JH Oh
K Choi
K Nagashio
KF Schuegraf
L Liao
L Liao
L Liao
M Higuchi
M Higuchi
R Degraeve
R Degraeve
R Hunger
S Guha
S Mohammed
S-Y Ren
SH Lo
SV Deshpande
T Ando
T Dimitrova
TE Cook
W Ranke
W Zhu
Y Wang
Y-C Yeo
YC Yeo
Z Wang
Publication venue
'Springer Science and Business Media LLC'
Publication date
Field of study
No full text
Crossref