73 research outputs found
Spatio-temporal powder formation and trapping in RF Silane plasmas using 2-D polarization-sensitive laser scattering
Time-resolved measurements of highly-polymerised negative ions in RF silane plasma deposition experiments
Negative hydrogenated silicon ion clusters as particle precursors in rf silane plasma deposition experiments
High growth rate deposition of hydrogenated microcrystalline Silicon by a high current DC discharge
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