101 research outputs found

    Ultrathin Stable Ohmic Contacts for High-Temperature Operation of Ī²\beta-Ga2_2O3_3 Devices

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    Beta gallium oxide (Ī²\beta-Ga2_2O3_3) shows significant promise in the high-temperature, high-power, and sensing electronics applications. However, long-term stable metallization layers for Ohmic contacts at high temperature present unique thermodynamic challenges. The current most common Ohmic contact design based on 20 nm of Ti has been repeatedly demonstrated to fail at even moderately elevated temperatures (300-400āˆ˜^{\circ}C) due to a combination of non-stoichiometric Ti/Ga2_2O3_3 interfacial reactions and kinetically favored Ti diffusion processes. Here we demonstrate stable Ohmic contacts for Ga2_2O3_3 devices operating up to 500-600āˆ˜^{\circ}C using ultrathin Ti layers with a self-limiting interfacial reaction. The ultrathin Ti layer in the 5nm Ti / 100nm Au contact stack is designed to fully oxidize while forming an Ohmic contact, thereby limiting both thermodynamic and kinetic instability. This novel contact design strategy results in an epitaxial conductive anatase titanium oxide interface layer that enables low-resistance Ohmic contacts that are stable both under long-term continuous operation (>500 hours) at 600āˆ˜^{\circ}C in vacuum (ā‰¤\leq 10āˆ’4^{-4} Torr), as well as after repeated thermal cycling (15 times) between room temperature and 550āˆ˜^{\circ}C in flowing N2_2. This stable Ohmic contact design will accelerate the development of high-temperature devices by enabling research focus to shift towards rectifying contacts and other interfacial layers.Comment: 25 Pages, 7 Figure

    Bulk and film synthesis pathways to ternary magnesium tungsten nitrides

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    Bulk solid state synthesis of nitride materials usually leads to thermodynamically stable, cation-ordered crystal structures, whereas thin film synthesis tends to favor disordered, metastable phases. This dichotomy is inconvenient both for basic materials discovery, where non-equilibrium thin film synthesis methods can be useful to overcome reaction kinetic barriers, and for practical technology applications where stable ground state structures are sometimes required. Here, we explore the uncharted Mg-W-N chemical phase space, using rapid thermal annealing to reconcile the differences between thin film and bulk powder syntheses. Combinatorial co-sputtering synthesis from Mg and W targets in a N2_2 environment yielded cation-disordered Mg-W-N phases in the rocksalt (0.1< Mg/(Mg+W) <0.9), and hexagonal boron nitride (0.7< Mg/(Mg+W) <0.9) structure types. In contrast, bulk synthesis produced a cation-ordered polymorph of MgWN2_2 that consists of alternating layers of rocksalt-like [MgN6_6] octahedra and nickeline-like [WN6_6] trigonal prisms (denoted "rocksaline"). Thermodynamic calculations corroborate these observations, showing rocksaline MgWN2_2 is stable while other polymorphs are metastable. We also show that rapid thermal annealing can convert disordered rocksalt films to this cation-ordered polymorph near the MgWN2_2 stoichiometry. Electronic structure calculations suggest that this rocksalt-to-rocksaline structural transformation should also drive a metallic-to-semiconductor transformation. In addition to revealing three new phases (rocksalt MgWN2_2 and Mg3_3WN4_4, hexagonal boron nitride Mg3_3WN4_4, and rocksaline MgWN2_2), these findings highlight how rapid thermal annealing can control polymorphic transformations, adding a new strategy for exploration of thermodynamic stability in uncharted phase spaces

    Prediction and realisation of high mobility and degenerate p type conductivity in CaCuP thin films

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    Phosphides are interesting candidates for hole transport materials and p type transparent conducting applications, capable of achieving greater valence band dispersion than their oxide counterparts due to the higher lying energy and increased size of the P 3p orbital. After computational identification of the indirect gap semiconductor CaCuP as a promising candidate, we now report reactive sputter deposition of phase pure p type CaCuP thin films. Their intrinsic hole concentration and hole mobility exceed 1 1020 cm amp; 8722;3 and 35 cm2 V amp; 8722;1 s amp; 8722;1 at room temperature, respectively. Transport calculations indicate potential for even higher mobilities. Copper vacancies are identified as the main source of conductivity, displaying markedly different behaviour compared to typical p type transparent conductors, leading to improved electronic properties. The optical transparency of CaCuP films is lower than expected from first principles calculations of phonon mediated indirect transitions. This discrepancy could be partly attributed to crystalline imperfections within the films, increasing the strength of indirect transitions. We determine the transparent conductor figure of merit of CaCuP films as a function of composition, revealing links between stoichiometry, crystalline quality, and opto electronic properties. These findings provide a promising initial assessment of the viability of CaCuP as a p type transparent contac

    Boron Phosphide Films by Reactive Sputtering Searching for a P Type Transparent Conductor

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    With an indirect band gap in the visible and a direct band gap at a much higher energy, boron phosphide BP holds promise as an unconventional p type transparent conductor. This work reports on reactive sputtering of amorphous BP films, their partial crystallization in a P containing annealing atmosphere, and extrinsic doping by C and Si. The highest hole concentration to date for p type BP 5 1020 cm amp; 8722;3 is achieved using C doping under B rich conditions. Furthermore, bipolar doping is confirmed to be feasible in BP. An anneal temperature of at least 1000 C is necessary for crystallization and dopant activation. Hole mobilities are low and indirect optical transitions are stronger than that predicted by theory. Low crystalline quality probably plays a role in both cases. High figures of merit for transparent conductors might be achievable in extrinsically doped BP films with improved crystalline qualit
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