1 research outputs found
Towards universal plasma-enabled platform for the advanced nanofabrication: plasma physics level approach
- Author
- A Altaweel
- A Anders
- A Anders
- A Anders
- A Anders
- A Fossati
- A Perret
- A Perret
- A Stechowa von
- A Yazdani
- AE Crespi
- APA Manfridini
- AS Shigarev
- AV Vasenkov
- B Liu
- BD Blackwell
- C Alves Jr
- C Charles
- C Luo
- C-S Shin
- CY Duluard
- D She
- D Sung
- DR Knapp
- DW Kim
- E Grigore
- EJDM Pillaca
- F Chen
- F Ferreira
- F Fietzke
- FF Chen
- FF Chen
- FF Chen
- FF Chen
- FZ Bouanis
- G Filipič
- G Filipič
- GJM Hagelaar
- H Amemiya
- H Kawasaki
- H Kawata
- H Kovaci
- H Takikawa
- H Tanaka
- HB Kim
- I Boromei
- I Levchenko
- I Levchenko
- I Levchenko
- I Levchenko
- I Levchenko
- I Levchenko
- I Levchenko
- J Bohlmark
- J Fang
- J Jin
- J Musil
- J Sun
- J-P Boeuf
- JH Bowles
- JM Stillahn
- JT Gudmundsson
- K Bazaka
- K Lemmer
- K Ostrikov
- K Ostrikov
- KA Atlasov
- KI Thomassen
- KM Chang
- KV Vavilin
- L Martinu
- L Shen
- Levchenko
- M Benda
- M Hundt
- M Volatier
- MA Lieberman
- MA Lieberman
- MAP Yazdi
- MCRL Cesconetto da
- MD Carter
- MJ Kushner
- MK Sharma
- MM Kharkov
- MMM Bilek
- MT Rahman
- MV Jacob
- MV Jacob
- NStJ Braithwaite
- O Baranov
- O Baranov
- O Baranov
- O Baranov
- O Baranov
- O Baranov
- O Baranov
- O Baranov
- O Baranov
- O Baranov
- OV Krysina
- OV Kumar
- P Diomede
- P Helander
- PEh Hovsepian
- PK Chu
- PK Schelling
- PL Ge
- Q Luo
- R Abdolvand
- R Hatakeyama
- R Mundo Di
- R Wei
- R Wei
- RL Stenzel
- S Chen
- S Ichimaru
- S Mazouffre
- S Rauf
- S Wang
- S Wilczek
- S Yang
- S Yick
- S Yick
- SC Gallo
- SC Gallo
- SE Rodil
- SFM Mariano de
- T Furukawa
- T Meziani
- T Shimizu
- T Uchida
- T Yamada
- Tae Hyung Kim
- V Godyak
- VA Godyak
- VI Kolobov
- W Lang
- WH Kao
- WP Tong
- X Li
- Y Li
- Y Li
- Y Tong
- Y Zhang
- Y Zhao
- Yohei Sakurai
- Z Wang
- Z Zhang
- ZJ Han
- ZJ Han
- Publication venue
- 'Springer Science and Business Media LLC'
- Publication date
- Field of study