96 research outputs found
Analysis of Charge-up Effects in CCPs and Chargeup-Free Neutral Beam Etching by PIC Simulation
1
Development of a parallel 2-dimensional particle-in-cell code and its application to a coaxial magnetron for the inner coating of narrow tubes
1
Charge-up Effects with Respect to Flux Ratios of Electronics to Ions in 3D Charge-up Simulations
1
Advanced simulations of application plasmas: Comparisons with experiments and validations
1
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