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- 01/01/1990
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- 28/12/1988
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- 01/01/1984
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- 01/01/1991
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- 01/01/1996
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No full text在等离子体增强化学气相淀积(PECVD)系统中,以高纯H_2高度稀释SiH_4为反应气体源,在射频和直流双重功率源的激励下制备成功具有纳米结构的nc-Si:H薄膜,利用高分辨率电子显微镜(HREM),Raman散射谱(RSS),扫描隧道电子显微镜(STM)等实验技术对nc-Si:H薄膜样品作了研究.基于对薄膜制备过程的动力学分析,提出nc-Si:H薄膜的分形生长模型:扩散与反应限制凝聚模型.其结果与实验符合得很好
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- 01/01/1994
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