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    串联分子泵获得10~(-9)Pa真空的实验研究

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    介绍了采用两级分子泵串联系统获得 10 - 9Pa真空度的实验研究。实验证明 ,通过串联一台分子泵 ,可以有效地提高系统对氢气的压缩比 ,显著提高系统的极限压强
    Institutional Repository of Institute of Modern Physics, CAS
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