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1 research outputs found
质量分离低能离子束沉积碳膜及离子轰击效应
Author
刘志凯
廖梅勇
+5 more
张键辉
李述汤
杨少延
王占国
秦复光
Publication venue
Publication date
01/01/2000
Field of study
No full text
用质量分离的低能离子束沉积技术得到了非晶碳薄膜,X射线衍射、Raman谱以及俄歇深度谱的线形表明,此种非晶碳膜中镶嵌着金刚石颗粒。碳离子的浅注入是该碳膜SP~3形成的主要机理。从一个侧面说明了化学气相沉积法中偏压预处理增加金刚石成核的主要原因是因为离子轰击效应
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