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1 research outputs found
Top-down delayering to expose large inspection area on die side-edge with Platinum (Pt) deposition technique
Author
B. Liu
D.D. Wang
+18Â more
G.R. Low
H. Feng
H. Tan
H.H. Yap
J. Lam
J. Zhu
Liang
M.K. Dawood
P.K. Tan
R. He
Rosenkranz
Tan
Wills
Y.M. Huang
Y.Z. Zhao
Yap
Yap
Z.H. Mai
Publication venue
'Elsevier BV'
Publication date
Field of study
No full text
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