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4 research outputs found

Preparation of silicon nitride and oxonitride by gas-phase pyrolysis of hexamethyldisilazane

Author: A. S. Lysenkov
K. A. Solntsev
N. A. Alad’ev
N. A. Ovsyannikov
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S. N. Ivicheva
Yu. F. Kargin
Publication venue: Intercontact Science
Publication date: 01/01/2019
Field of study

Preparation of Silicon Nitride and Oxonitride by Gas-Phase Pyrolysis of Hexamethyldisilazane

Author: A. S. Lysenkov
K. A. Solntsev
N. A. Alad’ev
N. A. Ovsyannikov
S. N. Ivicheva
Yu. F. Kargin
Publication venue: Pleiades Publishing Ltd
Publication date: 01/03/2020
Field of study

Preparation of silicon nitride and oxonitride by gas-phase pyrolysis of hexamethyldisilazane

Author
Publication venue: 'Intercontact Science'
Publication date: 01/01/2019
Field of study

Preparation of Silicon Nitride and Oxonitride by Gas-Phase Pyrolysis of Hexamethyldisilazane

Author: A. Zerr
C.M. Wang
F.F. Lange
H. Toraya
J.A. Wendel
K. Hiraga
K. Nakamoto
K. Tsucuma
K.K. Ge
M. Schwarz
M.F. Wani
N. Fainer
N. Herlin
P.F. Becher
R. Grün
R.A. Andrievskii
R.L. Satet
S. Peter
V.K. Tomar
V.P. Kopylova
X.-J. Liu
Yu.F. Kargin
Yu.F. Kargin
Z. Tatli
Publication venue: 'Pleiades Publishing Ltd'
Publication date
Field of study

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