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    4 research outputs found

    Preparation of silicon nitride and oxonitride by gas-phase pyrolysis of hexamethyldisilazane

    Author
    1. A. S. Lysenkov
    2. K. A. Solntsev
    3. N. A. Alad’ev
    4. N. A. Ovsyannikov
    5. null null
    6. null null
    7. null null
    8. null null
    9. null null
    10. null null
    11. S. N. Ivicheva
    12. Yu. F. Kargin
    Publication venue
    Intercontact Science
    Publication date
    01/01/2019
    Field of study
    No full text
    Crossref

    Preparation of Silicon Nitride and Oxonitride by Gas-Phase Pyrolysis of Hexamethyldisilazane

    Author
    1. A. S. Lysenkov
    2. K. A. Solntsev
    3. N. A. Alad’ev
    4. N. A. Ovsyannikov
    5. S. N. Ivicheva
    6. Yu. F. Kargin
    Publication venue
    Pleiades Publishing Ltd
    Publication date
    01/03/2020
    Field of study
    Full text link
    Crossref

    Preparation of silicon nitride and oxonitride by gas-phase pyrolysis of hexamethyldisilazane

    Author
      Publication venue
      'Intercontact Science'
      Publication date
      01/01/2019
      Field of study
      No full text
      Crossref

      Preparation of Silicon Nitride and Oxonitride by Gas-Phase Pyrolysis of Hexamethyldisilazane

      Author
      1. A. Zerr
      2. C.M. Wang
      3. F.F. Lange
      4. H. Toraya
      5. J.A. Wendel
      6. K. Hiraga
      7. K. Nakamoto
      8. K. Tsucuma
      9. K.K. Ge
      10. M. Schwarz
      11. M.F. Wani
      12. N. Fainer
      13. N. Herlin
      14. P.F. Becher
      15. R. Grün
      16. R.A. Andrievskii
      17. R.L. Satet
      18. S. Peter
      19. V.K. Tomar
      20. V.P. Kopylova
      21. X.-J. Liu
      22. Yu.F. Kargin
      23. Yu.F. Kargin
      24. Z. Tatli
      Publication venue
      'Pleiades Publishing Ltd'
      Publication date
      Field of study
      No full text
      Crossref
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