Design and Simulation of a Novel Magnetic Microactuator for Microrobots in Lab-On-a-Chip Applications

This article presents the design of a magnetic microactuator comprising soft magnetic material blocks and flexible beams. The modular layout of the proposed microactuator promotes scalability towards different microrobotic applications using low magnetic fields.  The presented microactuator consists of three soft magnetic material (Ni-Fe 4750) blocks connected together via two Polydimethylsiloxane (PDMS) semi-circular beams. A detailed design approach is highlighted giving considerations toward compactness, range of motion and force characteristics of the actuator. The actuator displacement and force characteristics are approximately linear in the magnetic field strength range of 80-160 kA/m. It can achieve maximum displacements of 111.6 µm (at 160 kA/m) during extension and 10.7 µm (at 80 kA/m) during contraction under no-load condition. The maximum force output of the microactuator, computed through a contact simulation, was 404.3 nN at a magnetic field strength of 160 kA/m. The microactuator achieved stroke angles up to 18.4 in a study where the microactuator was integrated with a swimming microrobot executing rowing motion using an artificial appendage, providing insight into the capabilities of actuating untethered microrobots

FABRICATION OF MAGNETIC TWO-DIMENSIONAL AND THREE-DIMENSIONAL MICROSTRUCTURES FOR MICROFLUIDICS AND MICROROBOTICS APPLICATIONS

Micro-electro-mechanical systems (MEMS) technology has had an increasing impact on industry and our society. A wide range of MEMS devices are used in every aspects of our life, from microaccelerators and microgyroscopes to microscale drug-delivery systems. The increasing complexity of microsystems demands diverse microfabrication methods and actuation strategies to realize. Currently, it is challenging for existing microfabrication methods—particularly 3D microfabrication methods—to integrate multiple materials into the same component. This is a particular challenge for some applications, such as microrobotics and microfluidics, where integration of magnetically-responsive materials would be beneficial, because it enables contact-free actuation. In addition, most existing microfabrication methods can only fabricate flat, layered geometries; the few that can fabricate real 3D microstructures are not cost efficient and cannot realize mass production. This dissertation explores two solutions to these microfabrication problems: first, a method for integrating magnetically responsive regions into microstructures using photolithography, and second, a method for creating three-dimensional freestanding microstructures using a modified micromolding technique. The first method is a facile method of producing inexpensive freestanding photopatternable polymer micromagnets composed NdFeB microparticles dispersed in SU-8 photoresist. The microfabrication process is capable of fabricating polymer micromagnets with 3 µm feature resolution and greater than 10:1 aspect ratio. This method was used to demonstrate the creation of freestanding microrobots with an encapsulated magnetic core. A magnetic control system was developed and the magnetic microrobots were moved along a desired path at an average speed of 1.7 mm/s in a fluid environment under the presence of external magnetic field. A microfabrication process using aligned mask micromolding and soft lithography was also developed for creating freestanding microstructures with true 3D geometry. Characterization of this method and resolution limits were demonstrated. The combination of these two microfabrication methods has great potential for integrating several material types into one microstructure for a variety of applications