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    Phase correct routing for alternating phase shift masks

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    In this paper, we investigate routing restrictions that enable the generation of “correct by construction ” layouts for Dark Field AltPSM. Existing routers produce designs in which coloring errors are numerous, and up to 15 % of the pin locations in macros may cause unavoidable coloring errors. We identify routing restrictions which produce 100 % phase-correct results, and quantify the impact on wire-lengths and via counts
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