1 research outputs found
Phase correct routing for alternating phase shift masks
In this paper, we investigate routing restrictions that enable the generation of “correct by construction ” layouts for Dark Field AltPSM. Existing routers produce designs in which coloring errors are numerous, and up to 15 % of the pin locations in macros may cause unavoidable coloring errors. We identify routing restrictions which produce 100 % phase-correct results, and quantify the impact on wire-lengths and via counts