Temperature compensated tactile sensing using MOSFET with P(VDF-TrFE)/BaTiO3 capacitor as extended gate

This work presents Poly(vinylidene fluoride – trifluoroethylene))/Barium Titanate (P(VDF-TrFE)-BT) nanocomposite based touch sensors tightly coupled with MOSFET devices in extended gate configuration. The P(VDF-TrFE)-BT nanocomposite exploits the distinct piezo and pyroelectric properties of P(VDF-TrFE) polymer matrix and BT fillers to suppress the temperature response when force and temperature are varied simultaneously. The reasons for this unique feature have been established through structural and electrical characterization of nanocomposite. The proposed touch sensor was tested over a wide range of force/pressure (0-4N)/(0-364 Pa) and temperature (26-70°C) with almost linear response. The sensitivity towards force/pressure and temperature sensor are 670 mV/N/7.36 mV/Pa and 15.34 mV/°C respectively. With this modified touch sensing capability, the proposed sensors will open new direction for tactile sensing in robotic applications

Piezoelectric Transducers Based on Aluminum Nitride and Polyimide for Tactile Applications

The development of micro systems with smart sensing capabilities is paving the way to progresses in the technology for humanoid robotics. The importance of sensory feedback has been recognized the enabler of a high degree of autonomy for robotic systems. In tactile applications, it can be exploited not only to avoid objects slipping during their manipulation but also to allow safe interaction with humans and unknown objects and environments. In order to ensure the minimal deformation of an object during subtle manipulation tasks, information not only on contact forces between the object and fingers but also on contact geometry and contact friction characteristics has to be provided. Touch, unlike other senses, is a critical component that plays a fundamental role in dexterous manipulation capabilities and in the evaluation of objects properties such as type of material, shape, texture, stiffness, which is not easily possible by vision alone. Understanding of unstructured environments is made possible by touch through the determination of stress distribution in the surrounding area of physical contact. To this aim, tactile sensing and pressure detection systems should be integrated as an artificial tactile system. As illustrated in the Chapter I, the role of external stimuli detection in humans is provided by a great number of sensorial receptors: they are specialized endings whose structure and location in the skin determine their specific signal transmission characteristics. Especially, mechanoreceptors are specialized in the conversion of the mechanical deformations caused by force, vibration or slip on skin into electrical nerve impulses which are processed and encoded by the central nervous system. Highly miniaturized systems based on MEMS technology seem to imitate properly the large number of fast responsive mechanoreceptors present in human skin. Moreover, an artificial electronic skin should be lightweight, flexible, soft and wearable and it should be fabricated with compliant materials. In this respect a big challenge of bio-inspired technologies is the efficient application of flexible active materials to convert the mechanical pressure or stress into a usable electric signal (voltage or current). In the emerging field of soft active materials, able of large deformation, piezoelectrics have been recognized as a really promising and attractive material in both sensing and actuation applications. As outlined in Chapter II, there is a wide choice of materials and material forms (ceramics: PZT; polycrystalline films: ZnO, AlN; polymers and copolymers: PVDF, PVDF-TrFe) which are actively piezoelectric and exhibit features more or less attractive. Among them, aluminum nitride is a promising piezoelectric material for flexible technology. It has moderate piezoelectric coefficient, when available in c-axis oriented polycrystalline columnar structure, but, at same time, it exhibits low dielectric constant, high temperature stability, large band gap, large electrical resistivity, high breakdown voltage and low dielectric loss which make it suitable for transducers and high thermal conductivity which implies low thermal drifts. The high chemical stability allows AlN to be used in humid environments. Moreover, all the above properties and its deposition method make AlN compatible with CMOS technology. Exploiting the features of the AlN, three-dimensional AlN dome-shaped cells, embedded between two metal electrodes, are proposed in this thesis. They are fabricated on general purpose Kapton™ substrate, exploiting the flexibility of the polymer and the electrical stability of the semiconductor at the same time. As matter of fact, the crystalline layers release a compressive stress over the polymer, generating three-dimensional structures with reduced stiffness, compared to the semiconductor materials. In Chapter III, a mathematical model to calculate the residual stresses which arise because of mismatch in coefficient of thermal expansion between layers and because of mismatch in lattice constants between the substrate and the epitaxially grown films is adopted. The theoretical equation is then used to evaluate the dependence of geometrical features of the fabricated three-dimensional structures on compressive residual stress. Moreover, FEM simulations and theoretical models analysis are developed in order to qualitative explore the operation principle of curved membranes, which are labelled dome-shaped diaphragm transducers (DSDT), both as sensors and as piezo-actuators and for the related design optimization. For the reliability of the proposed device as a force/pressure sensor and piezo-actuator, an exhaustive electromechanical characterization of the devices is carried out. A complete description of the microfabrication processes is also provided. As shown in Chapter IV, standard microfabrication techniques are employed to fabricate the array of DSDTs. The overall microfabrication process involves deposition of metal and piezoelectric films, photolithography and plasma-based dry and wet etching to pattern thin films with the desired features. The DSDT devices are designed and developed according to FEM and theoretical analysis and following the typical requirements of force/pressure systems for tactile applications. Experimental analyses are also accomplished to extract the relationship between the compressive residual stress due to the aluminum nitride and the geometries of the devices. They reveal different deformations, proving the dependence of the geometrical features of the three-dimensional structures on residual stress. Moreover, electrical characterization is performed to determine capacitance and impedance of the DSDTs and to experimentally calculate the relative dielectric constant of sputtered AlN piezoelectric film. In order to investigate the mechanical behaviour of the curved circular transducers, a characterization of the flexural deflection modes of the DSDT membranes is carried out. The natural frequency of vibrations and the corresponding displacements are measured by a Laser Doppler Vibrometer when a suitable oscillating voltage, with known amplitude, is applied to drive the piezo-DSDTs. Finally, being developed for tactile sensing purpose, the proposed technology is tested in order to explore the electromechanical response of the device when impulsive dynamic and/or long static forces are applied. The study on the impulsive dynamic and long static stimuli detection is then performed by using an ad hoc setup measuring both the applied loading forces and the corresponding generated voltage and capacitance variation. These measurements allow a thorough test of the sensing abilities of the AlN-based DSDT cells. Finally, as stated in Chapter V, the proposed technology exhibits an improved electromechanical coupling with higher mechanical deformation per unit energy compared with the conventional plate structures, when the devices are used as piezo-actuator. On the other hand, it is well suited to realize large area tactile sensors for robotics applications, opening up new perspectives to the development of latest generation biomimetic sensors and allowing the design and the fabrication of miniaturized devices

Deep Thermal Imaging: Proximate Material Type Recognition in the Wild through Deep Learning of Spatial Surface Temperature Patterns

We introduce Deep Thermal Imaging, a new approach for close-range automatic recognition of materials to enhance the understanding of people and ubiquitous technologies of their proximal environment. Our approach uses a low-cost mobile thermal camera integrated into a smartphone to capture thermal textures. A deep neural network classifies these textures into material types. This approach works effectively without the need for ambient light sources or direct contact with materials. Furthermore, the use of a deep learning network removes the need to handcraft the set of features for different materials. We evaluated the performance of the system by training it to recognise 32 material types in both indoor and outdoor environments. Our approach produced recognition accuracies above 98% in 14,860 images of 15 indoor materials and above 89% in 26,584 images of 17 outdoor materials. We conclude by discussing its potentials for real-time use in HCI applications and future directions.Comment: Proceedings of the 2018 CHI Conference on Human Factors in Computing System

Progress in Probe-Based Sensing Techniques for In Vivo Diagnosis

Advancements in robotic surgery help to improve the endoluminal diagnosis and treatment with minimally invasive or non-invasive intervention in a precise and safe manner. Miniaturized probe-based sensors can be used to obtain information about endoluminal anatomy, and they can be integrated with medical robots to augment the convenience of robotic operations. The tremendous benefit of having this physiological information during the intervention has led to the development of a variety of in vivo sensing technologies over the past decades. In this paper, we review the probe-based sensing techniques for the in vivo physical and biochemical sensing in China in recent years, especially on in vivo force sensing, temperature sensing, optical coherence tomography/photoacoustic/ultrasound imaging, chemical sensing, and biomarker sensing

Sensors for Robotic Hands: A Survey of State of the Art

Recent decades have seen significant progress in the field of artificial hands. Most of the surveys, which try to capture the latest developments in this field, focused on actuation and control systems of these devices. In this paper, our goal is to provide a comprehensive survey of the sensors for artificial hands. In order to present the evolution of the field, we cover five year periods starting at the turn of the millennium. At each period, we present the robot hands with a focus on their sensor systems dividing them into categories, such as prosthetics, research devices, and industrial end-effectors.We also cover the sensors developed for robot hand usage in each era. Finally, the period between 2010 and 2015 introduces the reader to the state of the art and also hints to the future directions in the sensor development for artificial hands