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    6 research outputs found

    Mirror Surface Finishing of Silicon Wafer Edge Using Ultrasonic Assisted Fixed-Abrasive CMP (UF-CMP)

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      'Fuji Technology Press Ltd.'
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      The physical basis of analogies in physical system models

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      CRC Press/Balkema
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      University of Twente Research Information

      Actual service life prediction of building components

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      'Rilem Publications SARL'
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      Crosscutting Technology Development at the Center for Advanced Separation Technologies

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        'Office of Scientific and Technical Information (OSTI)'
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