Microsystems technology: objectives

This contribution focuses on the objectives of microsystems technology (MST). The reason for this is two fold. First of all, it should explain what MST actually is. This question is often posed and a simple answer is lacking, as a consequence of the diversity of subjects that are perceived as MST. The second reason is that a map of the somewhat chaotic field of MST is needed to identify sub-territories, for which standardization in terms of system modules an interconnections is feasible. To define the objectives a pragmatic approach has been followed. From the literature a selection of topics has been chosen and collected that are perceived as belonging to the field of MST by a large community of workers in the field (more than 250 references). In this way an overview has been created with `applications¿ and `generic issues¿ as the main characteristics

Experimental investigation on micromilling of oxygen-free, high-conductivity copper using tungsten carbide, chemistry vapour deposition and single-crystal diamond micro tools

Insufficient experimental data from various micro tools limit industrial application of the micromilling process. This paper presents an experimental comparative investigation into micromilling of oxygen-free, high-conductivity copper using tungsten carbide (WC), chemistry vapour deposition (CVD) diamond, and single-crystal diamond micromilling tools at a uniform 0.4mm diameter. The experiments were carried out on an ultra-precision micromilling machine that features high dynamic accurate performance, so that the dynamic effect of the machine tool itself on the cutting process can be reduced to a minimum. Micromachined surface roughness and burr height were characterized using white light interferometry, a scanning electron microscope (SEM), and a precision surface profiler. The influence of variation of cutting parameters, including cutting speeds, feedrate, and axial depth of cut, on surface roughness and burr formation were analysed. The experimental results show that there exists an optimum feedrate at which best surface roughness can be achieved. Optical quality surface roughness can be achieved with CVD and natural diamond tools by carefully selecting machining conditions, and surface roughness, Ra, of the order of 10nm can also be obtained when using micromilling using WC tools on the precision micromilling machine.EU FP6 MASMICRO projec

The implementation of uncertainty evaluation model in manufacturability analysis system for miniature machine tool

The development of Manufacturability Analysis System for micro-machining domain (MicroMAS) is intended to address the need of the 4-axis Miniature Machine Tool (MMT) that require such system to assist the user in generating micro-component through manufacturability evaluation. One of the manufacturability aspects being assessed is the impacts from Uncertainty Evaluation Model (UEM) analysis that analyse the influence of the errors stemmed from the MMT construction on the geometrical accuracy of the machined micro-parts. The model has allowed a methodology for the errors in a custom-made MMT to be predicted and to further understand the origin of the errors on the machined micro-part. This paper reports on the implementation of UEM in the development of MicroMAS. Therefore, the results from uncertainty evaluation towards the MMT were integrated in the database which are interactively searched based on IF-THEN clauses in order to determine which rules satisfy the requirements expressed via inputs

Integrated Lithographic Molding for Microneedle-Based Devices

This paper presents a new fabrication method consisting of lithographically defining multiple layers of high aspect-ratio photoresist onto preprocessed silicon substrates and release of the polymer by the lost mold or sacrificial layer technique, coined by us as lithographic molding. The process methodology was demonstrated fabricating out-of-plane polymeric hollow microneedles. First, the fabrication of needle tips was demonstrated for polymeric microneedles with an outer diameter of 250 mum, through-hole capillaries of 75-mum diameter and a needle shaft length of 430 mum by lithographic processing of SU-8 onto simple v-grooves. Second, the technique was extended to gain more freedom in tip shape design, needle shaft length and use of filling materials. A novel combination of silicon dry and wet etching is introduced that allows highly accurate and repetitive lithographic molding of a complex shape. Both techniques consent to the lithographic integration of microfluidic back plates forming a patch-type device. These microneedle-integrated patches offer a feasible solution for medical applications that demand an easy to use point-of-care sample collector, for example, in blood diagnostics for lithium therapy. Although microchip capillary electrophoresis glass devices were addressed earlier, here, we show for the first time the complete diagnostic method based on microneedles made from SU-8

The Effect of Participation in Government Consortia on the R&D Productivity of Firms: A Case Study of Robot Technology in Japan

This paper examines the effect of participation in government-sponsored R&D consortia on the R&D productivity of firms in the case of robot technology in Japan. We attempt to provide a new empirical analysis and discussions on the issue of government project evaluation by using indicators of the quality of patents, by investigating the impact of the evolution of government programs, and comparing government-sponsored R&D consortia with collaborative R&D among firms. Using indicators of the quality of patents which enables us to provide an estimation of quality-adjusted research productivity, we find that participation in government programs has a positive impact on the research productivity of participating firms, but the impact of participation became much higher after the design of government programs in this field changed in the late 1990s. Also, we find that participation in government-sponsored consortia has a greater impact on research productivity than participation in collaborative R&D among firms. This may support government involvement in R&D as a coordinator of R&D collaboration.industrial policy, robot thchnology, Japanese innovation system, collaborative R&D

Micro-Electro-Mechanical-Systems (MEMS) and Fluid Flows

The micromachining technology that emerged in the late 1980s can provide micron-sized sensors and actuators. These micro transducers are able to be integrated with signal conditioning and processing circuitry to form micro-electro-mechanical-systems (MEMS) that can perform real-time distributed control. This capability opens up a new territory for flow control research. On the other hand, surface effects dominate the fluid flowing through these miniature mechanical devices because of the large surface-to-volume ratio in micron-scale configurations. We need to reexamine the surface forces in the momentum equation. Owing to their smallness, gas flows experience large Knudsen numbers, and therefore boundary conditions need to be modified. Besides being an enabling technology, MEMS also provide many challenges for fundamental flow-science research

NIKA: A millimeter-wave kinetic inductance camera

Current generation millimeter wavelength detectors suffer from scaling limits imposed by complex cryogenic readout electronics. To circumvent this it is imperative to investigate technologies that intrinsically incorporate strong multiplexing. One possible solution is the kinetic inductance detector (KID). In order to assess the potential of this nascent technology, a prototype instrument optimized for the 2 mm atmospheric window was constructed. Known as the N\'eel IRAM KIDs Array (NIKA), it was recently tested at the Institute for Millimetric Radio Astronomy (IRAM) 30-meter telescope at Pico Veleta, Spain. The measurement resulted in the imaging of a number of sources, including planets, quasars, and galaxies. The images for Mars, radio star MWC349, quasar 3C345, and galaxy M87 are presented. From these results, the optical NEP was calculated to be around $1 \times 10^{-15}$ W$/$Hz$^{1/2}$. A factor of 10 improvement is expected to be readily feasible by improvements in the detector materials and reduction of performance-degrading spurious radiation.Comment: Accepted for publication in Astronomy & Astrophysic

Optically driven micromachines: Progress and prospects

The ability to exert optical torques to rotationally manipulate microparticles has developed from an interesting curiosity to seeing deployment in practical applications. Is the next step to genuine optically-driven micromachines feasible or possible? We review the progress made towards this goal, and future prospects

Wet chemical etching mechanism of silicon

We review what can be said on wet chemical etching of single crystals from the viewpoint of the science of crystal growth. Starting point is that there are smooth and rough crystal surfaces. The kinetics of smooth faces is controlled by a nucleation barrier that is absent on rough faces. The latter therefore etch faster by orders of magnitude. The analysis of the diamond crystal structure reveals that the {111} face is the only smooth face in this lattice-other faces might be smooth only because of surface reconstruction. In this way we explain the minimum of the etch rate in KOH:H2O in the <001> direction. Two critical predictions concerning the shape of the minimum of the etch rate close to <001> and the transition from isotropic to anisotropic etching in HF:HNO3 based solutions are tested experimentally. The results are in-agreement with the theor